Vertical distribution feedback surface emitting laser and preparation method thereof

A technology of surface-emitting lasers and vertical distribution, which is applied in the direction of lasers, laser components, semiconductor lasers, etc., can solve the problems of difficult to achieve mass production of narrow line width application requirements, poor wavelength stability, low power density, etc., and achieve easy mass production , stable wavelength, and reduced spectral linewidth

Pending Publication Date: 2021-12-21
VERTILITE CO LTD
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Problems solved by technology

[0004] In view of this, the embodiment of the present invention provides a vertical distribution feedback surface emitting laser and its preparation method, which solves the problem of poor wavelength stability, low power density, complex structure, difficulty in mass production and narrow line width in the prior art. Application Requirements Technical Questions

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  • Vertical distribution feedback surface emitting laser and preparation method thereof
  • Vertical distribution feedback surface emitting laser and preparation method thereof
  • Vertical distribution feedback surface emitting laser and preparation method thereof

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Embodiment

[0036] An embodiment of the present invention provides a vertical distribution feedback surface emitting laser. figure 1 It is a schematic structural diagram of a vertical distribution feedback surface emitting laser provided by an embodiment of the present invention; figure 2 yes figure 1 A schematic diagram of the top view structure of an oxide layer provided in ; image 3 yes figure 1 Schematic cross-section of a vertically distributed feedback surface emitting laser along the I-I' direction in . Such as Figure 1-Figure 3 As shown, the vertical distributed feedback surface emitting laser 10 includes a first cavity surface 1, a periodic distributed feedback structure 2 and a second cavity surface 3; along the first direction (as shown in the X direction in the figure), the periodic distributed feedback structure 2 It includes a plurality of distributed feedback structures 12, and the distributed feedback structure 12 includes an oxide layer 121, an active region 122 an...

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Abstract

The embodiment of the invention discloses a vertical distribution feedback surface emitting laser and a preparation method thereof. The laser comprises a first cavity surface, a periodic distribution feedback structure and a second cavity surface; the periodic distributed feedback structure comprises a plurality of distributed feedback structures along a first direction, each distributed feedback structure comprises an oxide layer, an active region and a tunnel junction, the plurality of oxide layers are arranged to replace a second-order grating to adjust uniform distribution of light, the oxide layers are arranged to be high-impedance structures, the current flowing direction is controlled, the light emitting power is improved, and further, the period of the periodical distribution feedback structure is set to be integral multiples of the half-wavelength of the effective emergent wavelength of the vertical distribution feedback surface emitting laser, the emergent wavelength range of the laser is limited, the spectral line width is reduced, and the wavelength stability of the laser is improved. The technical problems that in the prior art, a laser is poor in wavelength stability, low in power density, complex in structure and difficult to achieve mass production and narrow linewidth application requirements are solved.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of semiconductor lasers, in particular to a vertical distribution feedback surface emitting laser and a manufacturing method thereof. Background technique [0002] Applications such as light detection and ranging, such as lidar, use infrared light to create an accurate three-dimensional map of the environment, a key technology in the development of autonomous vehicles. Combined with a radar and camera system, it acts as the car's vision, capturing its surroundings. [0003] So far, edge-emitting lasers have had deviations of up to 40nm in wavelength stability as the component temperature increases, causing the "vision" of the LiDAR system to be somewhat blurred. In order to solve this problem, a distributed feedback (Distributed Feedback Laser, DFB) laser or a distributed Bragg reflection cavity (DBR) laser is usually used. Both can achieve good wavelength stability, but their manufac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/183H01S5/028
CPCH01S5/18313H01S5/028
Inventor 张成梁栋
Owner VERTILITE CO LTD
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