A method for improving out-of-band suppression of bulk acoustic wave filter and filter structure
A bulk acoustic wave filter and lifting band technology, which is applied in the field of filters, can solve problems affecting the application of single crystal thin film surface acoustic wave filters, etc., and achieve the effects of reducing baseband noise, improving out-of-band rejection, and eliminating the influence of echoes
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[0039] The preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
[0040] A method for enhancing out-of-band suppression of a bulk acoustic wave filter according to the present invention, such as figure 1 As shown, the method for enhancing out-of-band suppression includes:
[0041] Step 1, setting a sound velocity buffer layer on the substrate, and setting a piezoelectric layer on the sound velocity buffer layer;
[0042] Step 2, setting M IDTs on the piezoelectric layer, wherein M is an odd number greater than 3; among the M IDTs, the finger bar of each IDT itself The width is the same as the width of the gap between the fingers, and the number of arrays of fingers of each interdigital transducer is singular, and the number of fi...
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