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Treatment method of grinding waste liquid and hydrofluoric acid-containing waste liquid

A treatment method, hydrofluoric acid technology, applied in the preparation/treatment of fluosilicic acid, rare earth metal compounds, aluminum fluoride, etc., can solve problems such as environmental impact

Pending Publication Date: 2022-01-11
ENVIRO-INNOVATE TECH CO LTD
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

Not only the toxic substances in the waste liquid may have an impact on the environment, but also the waste liquid may still contain some economically valuable components

Method used

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  • Treatment method of grinding waste liquid and hydrofluoric acid-containing waste liquid

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Embodiment Construction

[0017] Reference will now be made in detail to the exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and descriptions to refer to the same or like parts.

[0018] figure 1 It is a flowchart of a method for treating grinding waste liquid and hydrofluoric acid containing waste liquid according to some embodiments of the present invention. In some embodiments, the above method includes the following steps.

[0019] Please refer to figure 1 , performing step S100 to provide grinding waste liquid. The polishing waste comes from the used polishing liquid during the chemical mechanical polishing process. For example, the CMP process can be used to planarize oxides (such as silicon oxide), nitrides (such as silicon nitride), metals (such as tungsten, copper), or combinations thereof on a semiconductor wafer. However, the above-mentioned chemical mec...

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Abstract

A method for treating a grinding waste liquid and a hydrofluoric acid-containing waste liquid comprises the following steps: providing the grinding waste liquid which comprises an oxide capable of reacting with hydrofluoric acid to generate a non-water-soluble product; providing another waste liquid containing fluosilicic acid and hydrofluoric acid; mixing the two waste liquids to form a first mixed liquid in which the oxide reacts with the hydrofluoric acid to form a non-water-soluble fluoride; filtering the first mixed solution; taking out a first recovery product comprising fluoride; providing a metal salt capable of reacting with fluosilicic acid to generate fluosilicate; mixing a metal salt with the first mixed liquor from which the first recovery product is taken out to form a second mixed liquor, in which the metal salt reacts with the fluosilicic acid to generate a water-insoluble fluosilicate; filtering the second mixed solution; and withdrawing a second recovery product comprising the fluorosilicate.

Description

technical field [0001] The invention relates to a treatment method for grinding waste liquid and hydrofluoric acid-containing waste liquid, and in particular to a method for recovering grinding waste liquid and hydrofluoric acid-containing waste liquid which can separate metal fluoride and fluorosilicate method. Background technique [0002] In the process of high-tech industries such as the semiconductor industry, panel industry, and photovoltaic industry, a large amount of chemical solutions containing etching liquid and polishing liquid are used. These chemical solutions become waste after use. Not only the toxic substances in the waste liquid may have an impact on the environment, but also the waste liquid may still contain some components with economic value. With the development of science and technology industry, the output of waste liquid is also increasing day by day. Therefore, methods for reducing the toxicity of waste liquid and separating components with econ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B9/08C01B33/10C01F7/50C01F17/10C01F17/265
CPCC01F7/50C01F17/10C01F17/265C01B33/103C01B9/08
Inventor 曾尧宣吴兆原黄文庆
Owner ENVIRO-INNOVATE TECH CO LTD
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