Bidirectional double-frequency-point terahertz modulator
A terahertz, dual-frequency technology, applied in the field of terahertz waves, can solve the problems of high processing technology and processing environment requirements, complex device structure, difficult manufacturing process, etc., and achieve novel control principle, simple and compact structure, and convenient manufacturing. Effect
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[0027] In this embodiment, the structure and the shape of each component of the two-way dual-frequency point terahertz regulator are as described above, and thus will not be described again. However, the specific parameters of each component are as follows:
[0028] The 24×24 unit structure is arranged on a plane perpendicular to the input direction of the terahertz wave. The radius of the single-opening metal outer ring is 40 μm, the width of the metal strip is 5 μm, and the metal thickness is 0.2 μm. The inner ring of the middle notch has a radius of 20 μm, and the metal strip has a width of 5 μm and a length of 20 μm. The thickness of the middle polyimide dielectric layer is 30 μm. The vanadium dioxide thin film layer has a thickness of 0.2 μm.
[0029] The terahertz wave signal is input from the input terminal 1, and the terahertz transmitted wave is output from the terahertz wave output terminal 3 after passing through the two-way dual-frequency point terahertz regulato...
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