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Shunt filter for helium mass spectrometer leak detector

A helium mass spectrometer leak detector and filter technology, which is applied to the instrument, can solve the problems such as deviation of the leak detection result of the helium mass spectrometer leak detector by detecting the appearance of fluid at the leak point, testing the fluid tightness, etc. The effect of leak detection accuracy

Active Publication Date: 2022-02-01
深圳华尔升智控技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a shunt filter for a helium mass spectrometer leak detector, which solves the problem that the leak detection results of the helium mass spectrometer leak detector deviate due to the content of other gases in the air

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  • Shunt filter for helium mass spectrometer leak detector
  • Shunt filter for helium mass spectrometer leak detector
  • Shunt filter for helium mass spectrometer leak detector

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] In describing the present invention, it is to be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "surrounding" etc. Indicating orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in...

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Abstract

The invention discloses a shunt filter for a helium mass spectrometer leak detector, and relates to the technical field of helium mass spectrometer leak detection equipment. The shunt filter for the helium mass spectrometer leak detector comprises a combustion supply plate, a miniature vent hole, a fixed outer shell, a rotary inner shell and a heating resistor. A magnesium rod is placed on the surface of the combustion supply plate, the heating device is heated, the heating resistor is electrified till that the ignition point of the magnesium rod is reached, the magnesium rod can react with nitrogen, oxygen and carbon dioxide in air, a generated gas is non-gas, the content of helium is not affected, and therefore the content of helium in gas sucked by the helium mass spectrometer leak detector is increased, the leak detection precision of the helium mass spectrometer leak detector is improved, a plurality of bent miniature vent holes do not obstruct the inlet and outlet of gas and do not prevent generated solids from falling into the helium mass spectrometer leak detector, and the fixed outer shell and the rotary inner shell can be used for protection due to the fact that the heat of the heating resistor is very high when the heating resistor is electrified and heated. And meanwhile, the replacement of the heating resistor is not hindered.

Description

technical field [0001] The invention relates to the technical field of helium mass spectrometer leak detection equipment, in particular to a shunt filter for a helium mass spectrometer leak detector. Background technique [0002] Helium mass spectrometer leak detector is an instrument specially used for leak detection using helium as the leak gas. It has the characteristics of stable performance and high sensitivity. It is the most sensitive and most commonly used leak detection instrument in vacuum leak detection technology. , There are many leak detection methods for helium mass spectrometer leak detectors, including helium spray leak detection, sniffing leak detection, vacuum leak detection, sniffing gun accumulation leak detection and back pressure leak detection, etc. [0003] In the method of helium spray leak detection, the inside of the tested part is evacuated first, and helium is sprayed while walking around the tested part. If there is a leak on the surface of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20
CPCG01M3/205
Inventor 冉振为洪荣丰杨效曹大阳郭炳汉汪浩
Owner 深圳华尔升智控技术有限公司
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