Piezoelectric film
A piezoelectric thin film, piezoelectric body technology, applied in the direction of circuits, piezoelectric/electrostrictive transducers, piezoelectric devices/electrostrictive devices, etc., can solve the trouble of carrying, damage lightness and flexibility, and cannot Sufficiently achieve thinning and other issues, and achieve the effects of preventing defects, good acoustic characteristics, and good durability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0280] pass Figure 2 to Figure 5 The shown method to fabricate the piezoelectric film.
[0281] First, cyanoethylated PVA (CR-V manufactured by Shin-Etsu Chemical Co., Ltd.) was dissolved in dimethylformamide (DMF) at the following composition ratio. Then, PZT particles were added as piezoelectric particles in the following composition ratio to this solution, and stirred using a propeller mixer (rotational speed: 2000 rpm) to prepare a coating material for forming a piezoelectric layer.
[0282] ・PZT particles 300 parts by mass
[0283] ·Cyanoethylated PVA...30 parts by mass
[0284] ·DMF················· 70 parts by mass
[0285] In addition, as the PZT particles, a mixture obtained by wet-mixing powders of Pb oxide, Zr oxide, and Ti oxide as main components with a ball mill so that Zr = 0.52 mol and Ti = 0.48 mol with respect to Pb = 1 mol was used. PZT particles were crushed after the powder was fired at 800°C for 5 hours.
[0286] On the other hand, a sheet in which ...
Embodiment 2～ Embodiment 9
[0311] [Example 2 to Example 9, Example 11 to Example 16, Example 18 to Example 20, and Comparative Example 1 to Comparative Example 4]
[0312] In the formation of the upper laminated body and the lower laminated body, the upper laminated body and the lower laminated body were formed in the same manner as in Example 1, except that the coating thickness of the coating material for forming the piezoelectric layer and the conditions of the rolling treatment were variously changed. laminated body, thereby producing a piezoelectric film.
[0313] For the produced piezoelectric film, the porosity of the upper region and the porosity of the lower region were measured in the same manner as in Example 1, and the porosity ratio and average porosity were calculated.
Embodiment 10
[0315] In the same manner as the formation of the upper laminate in Example 1, except for changing the coating thickness of the coating material for forming the piezoelectric layer and the conditions of the rolling treatment, a laminate having a lower protective layer, a lower electrode, and rolling treatment was produced. and a laminate of polarized piezoelectric layers.
[0316] In addition, the temperature of the heating roll was set at 60° C., the pressing force of the heating roll was set at 0.05 MPa, and the moving speed of the heating roll was set at 3 m / min to perform calendering 30 times.
[0317] A sheet having the same upper electrode and upper protective layer as in Example 1 was stacked on the manufactured laminate so that the upper electrode and the piezoelectric layer faced each other (refer to Figure 6 ).
[0318] Next, using a laminator, the laminated body and the laminated body of the sheet were subjected to thermocompression bonding at a temperature of 120...
PUM
| Property | Measurement | Unit |
|---|---|---|
| storage modulus | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More