Method for removing silicone oil dirt on surface of silicon-based chip

Abstract

The invention discloses a method for removing silicone oil dirt on the surface of a silicon-based chip, and belongs to the technical field of integrated circuit electronic packaging. According to the method, a UV film is used for fixing a chip, the chip is placed in an organic solvent isopropanol, and an ultrasonic cleaning method is used. Contrast experiments show that, when the ultrasonic power is set to be 270 W, the frequency is set to be 26.4 KHz and the cleaning time is set to be 5 min, silicone oil dirt on the surface of the chip can be removed. Tests prove that the performance and the assembling reliability of the chip are not affected after cleaning.

Description

Technical field [0001] The present invention relates to integrated circuit packaging electronic technology, particularly to a method of clearing the surface of the silicon chip of a silicone oil dirt. Background technique [0002] - the key electronic components, especially for military chip, in order to ensure its stability and reliability, in a monolithic GJB548B 2021.1 internal visual inspection method is provided that the chip 100% visual inspection of the interior before sealing the purpose of identifying potential device failure during normal use and internal defects and remove excess material. Defect comprises a metal layer defects, diffusion, and the passivation layer defects, and a chip dicing defects, a glass passivation layer defect, unwanted matter comprising a droplet on the chip, chemical stains, ink or photoresist and other movable extra material. [0003] Stored in a nitrogen cabinet zoned individual wafers prior to use internal visual inspection that the surface ...

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Problems solved by technology

[0003] The individual diced wafers stored in the nitrogen cabinet were visually inspected before use and found that there were sticky dirt on the surface, and the pollutants were observed under a 50X microscope as black particles, which were relatively dense, such as figure 1 As shown, under a 100-fold microscope, it is observed as transparent colloidal particles, such as figure 2 As shown, the use of conventional cleaning methods in the industry, such as ethanol soaking and chip brushing, has no obvious effect. After wiping the surface of the chip with ethanol cotton, the sticky dirt particles can be seen to be significantly reduced, but some particles enter the gap of the aluminum strip under pressure. cannot be removed

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