Controlled magnetic field chemical mechanical polishing equipment for complex curved surface
A complex surface, chemical-mechanical technology, used in grinding/polishing equipment, surface polishing machine tools, metal processing equipment, etc. The effect of good consistency, strong versatility and high surface quality
Active Publication Date: 2022-02-18
DALIAN UNIV OF TECH +1
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Problems solved by technology
It solves the problems of existing five-axis linkage milling, high surface roughness of complex curved surfaces after additive and subtractive material manufacturing, low polishing precision of existing complex curved surfaces, and thick damaged layer after polishing
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[0019] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0020] Such as figure 1 As shown, the embodiment of the present invention discloses a controlled magnetic field chemical mechanical polishing equipment for complex curved surfaces, including a spindle system, a polishing tank, a magnetic field system and a numerical control system. The equipment is a vertical structure and can realize chemica...
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The invention provides controlled magnetic field chemical mechanical polishing equipment for a complex curved surface. The equipment comprises a spindle system, a magnetic field system, a polishing groove and a numerical control system. During polishing, the polishing groove is filled with the chemical polishing liquid and the magnetic grinding material, the electromagnetic field in the polishing groove can be controlled by accurately controlling the power supply form of the electromagnetic coil in the polishing process, and then the movement track and the movement form of the magnetic grinding material in the polishing groove are controlled; by combining the change of the rotating speed and the deflection angle of the main shaft and the axial ultrasonic vibration effect of the main shaft, the magnetic grinding material can reach any surface of the curved surface part, and a softening film formed by chemical polishing liquid on the surface of the complex curved surface part can be removed with relatively strong and uniform mechanical grinding acting force; the equipment can be suitable for polishing complex curved surface parts of different types and different materials, the universality is high, and the polished complex curved surface parts are good in surface consistency and high in surface quality.
Description
technical field [0001] The invention relates to the technical field of mechanical processing equipment, in particular to chemical mechanical polishing equipment for complex curved surfaces with a controlled magnetic field. Background technique [0002] Parts with complex surfaces are usually machined using five-axis simultaneous milling, or using additive and subtractive manufacturing processes. The surface roughness after ordinary five-axis milling is Ra≥3.2um, and the surface roughness after additive and subtractive material manufacturing is Ra≥8um. Therefore, under the existing technical conditions, in order to further improve the surface quality of complex curved surface parts, grinding machines and polishing equipment are required for further processing to meet service requirements. Existing grinding and polishing methods, such as soft abrasive belt grinding and polishing, magnetorheological abrasive flow grinding and polishing, robot grinding and polishing, and other ...
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IPC IPC(8): B24B1/00B24B1/04B24B31/10B24B31/12
CPCB24B1/005B24B1/04B24B31/102B24B31/12
Inventor 张振宇李玉彪任政赵枢明孟凡宁徐光宏
Owner DALIAN UNIV OF TECH