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Spherical wave curvature radius measuring device and method based on vortex light interference Fermat spiral fitting

A Fermat spiral and curvature radius technology, applied in the field of spherical wave curvature radius measurement devices, can solve problems such as large environmental impact, expensive equipment, complex structure, etc., and achieve the effects of wide measurement range, improved measurement accuracy, and high measurement accuracy.

Active Publication Date: 2022-03-01
SHANDONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above-mentioned devices for measuring the radius of curvature of spherical waves have complex structures, expensive equipment, and are greatly affected by the environment.

Method used

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  • Spherical wave curvature radius measuring device and method based on vortex light interference Fermat spiral fitting
  • Spherical wave curvature radius measuring device and method based on vortex light interference Fermat spiral fitting
  • Spherical wave curvature radius measuring device and method based on vortex light interference Fermat spiral fitting

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Embodiment 1

[0025] Embodiment 1 The first embodiment provided by the present invention is a spherical wave radius of curvature measurement device based on vortex light interference pattern-Fermat spiral fitting, which is an improvement on the structure of the Mazeng interferometer. Such as figure 1 As shown, it includes a He-Ne laser 1, a beam expander system 2, a first dichroic prism 3, a quarter wave plate 4, a spiral phase plate 5, a first reflector 6, and a second reflector arranged in sequence along the laser transmission direction. Mirror 7, second dichroic prism 8, and CCD camera 10. The function of the quarter-wave plate 3 is to convert the incident linearly polarized light into circularly polarized light output, and it is necessary to make the angle between the polarization direction of the incident light and the optical axis of the quarter-wave plate 3 be 45°. The topological charge of the spiral phase plate 5 is 1. The first mirror 3 and the second mirror 7 must be strictly p...

Embodiment 2

[0028] Embodiment 2 The second embodiment provided by the present invention is a method for measuring the radius of curvature of spherical waves based on vortex light interference pattern-Fermat spiral fitting. The radius of curvature of a standard spherical reflector with a radius of curvature of 900 mm is measured as Example, using the device in Embodiment 1, the flow process is as figure 2 shown, including the following steps:

[0029] Step 1, use the CCD camera 10 to shoot the interference light intensity diagram of the spherical wave and the vortex light

[0030] When a beam of plane light wave is vertically incident on the spiral phase plate, the outgoing beam is modulated into a vortex beam, so the electric field expression of the vortex light wave based on the plane light wave is:

[0031] E. v =A v exp(-imθ) exp(ikz) (1)

[0032] The plane light wave is vertically incident on the surface of the spherical mirror to be tested, and the reflected light wave is a sphe...

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Abstract

The invention belongs to the technical field of optical measurement, and relates to a spherical wave curvature radius measuring device and method. The invention discloses a spherical wave curvature radius measuring device based on vortex light interference pattern-Fermat spiral fitting. The spherical wave curvature radius measuring device comprises a laser, a beam expanding system, a first beam splitter prism, a first reflector, a second reflector, a second beam splitter prism and a CCD camera which are sequentially arranged in the laser transmission direction. A quarter-wave plate and a spiral phase plate are sequentially arranged between the first beam splitter prism and the first reflector; the included angle between the polarization direction of the incident light and the optical axis of the quarter-wave plate is 45 degrees; and the CCD camera is used for shooting an interference intensity diagram of the spherical wave and the vortex light. According to the principle that the maximum distribution of the vortex light interference intensity pattern meets the standard Fermat spiral, the maximum distribution is fitted through the least square method, the Fermat spiral coefficient is obtained, then the curvature radius of the spherical wave is obtained, the measurement precision is high, the measurement range is wide, and the curvature radius solving algorithm is simple.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and relates to a spherical wave curvature radius measurement device and method. Background technique [0002] The high-precision measurement of the radius of curvature of spherical waves has always been one of the key issues affecting the performance of large optical systems. Since optical inspection instruments and measurement methods, such as spherical instruments, laser spherical interferometers, and knife-edge methods, have their own limitations in the measurement of large curvature radii, researchers are working hard to develop simpler and more accurate methods for the measurement of large curvature radius spherical mirrors. Test metrology technology. Gerchman introduced the large curvature radius measurement technology based on the Fizeau interferometer. This method is based on a cavity with a folded optical path and can measure spherical mirrors with a curvature radius up to 1...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/255
CPCG01B11/255G01B11/2441
Inventor 杨忠明杨栋刘兆军
Owner SHANDONG UNIV