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Method for measuring piezoelectric shearing stack high-frequency motion displacement based on AFM knocking processing track

A technology of movement displacement and processing trajectory, which is applied in image data processing, instrumentation, calculation, etc.

Pending Publication Date: 2022-03-08
NORTHEAST FORESTRY UNIVERSITY
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the displacement measurement problem of the two-dimensional high-frequency motion of the two-axis piezoelectric shear stack driven by high-frequency voltage, and propose a method of using AFM probe to measure the piezoelectric The method of shearing the movement displacement of the stack realizes the accurate detection of its two-dimensional high-frequency complex movement in a semi-contact manner

Method used

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  • Method for measuring piezoelectric shearing stack high-frequency motion displacement based on AFM knocking processing track
  • Method for measuring piezoelectric shearing stack high-frequency motion displacement based on AFM knocking processing track
  • Method for measuring piezoelectric shearing stack high-frequency motion displacement based on AFM knocking processing track

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Embodiment Construction

[0019] refer to Figure 1 to Figure 5 To describe this embodiment,

[0020] This method is a method for measuring the two-dimensional high-frequency motion displacement of a two-axis piezoelectric shear stack (piezoelectric ceramics) by using the machining trajectory in the knocking mode of an atomic force microscope (Atomic Force Microscopy, AFM).

[0021] Single crystal silicon wafer 3 with PMMA thin film 2

[0022] In the tapping mode, the vibration frequency of the AFM probe 1 can reach more than 300kHz, which is much higher than the working frequency (1kHz-20kHz) of the two-axis piezoelectric shear stack 4 movement, so every point on the movement track will be detected by the AFM Probe 1 was tapped multiple times leaving dimples. At the same time, the vibration direction of the AFM probe 1 is not in the motion plane of the two-axis piezoelectric shear stack 4 , but perpendicular to each other, which reduces the mutual motion interference. Therefore, the measurement met...

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Abstract

The invention discloses a method for measuring piezoelectric shear stack high-frequency motion displacement based on an AFM knocking processing track, and belongs to the technical field of piezoelectric driving. The two-dimensional high-frequency complex motion can be accurately detected in a semi-contact mode. The method comprises the following steps: S1, preparing a PMMA film; s2, building a processing device, and mounting the PMMA film on the processing device; s3, carrying out knocking processing on the PMMA film by the AFM, and determining the driving amplitude of the knocking processing of an AFM probe; s4, AFM in-situ knocking processing is carried out on the PMMA film moving in a two-dimensional high-frequency mode S5, the AFM probe scans and measures the track of the knocking processing to represent the track of the two-axis piezoelectric shearing stacking motion; and S6, realizing transverse displacement, longitudinal displacement and motion displacement characterization of the two-axis piezoelectric shear stack under different voltages and frequencies. According to the invention, AFM knocking and scribing processing in a micro-nano processing technology is combined with piezoelectric ceramics, so that accurate characterization of a high-frequency motion track of a two-axis piezoelectric shearing stack in a two-dimensional plane is realized.

Description

technical field [0001] The invention belongs to the field of piezoelectric drive technology, and in particular relates to a method for measuring the high-frequency motion displacement of a piezoelectric shear stack. Background technique [0002] The inverse piezoelectric effect of piezoelectric ceramic materials can realize the transformation of electrical energy into mechanical energy, and is widely used as a driving element in precision positioning systems. Therefore, it is very important to accurately detect the output displacement of piezoelectric ceramics under the action of driving voltage. At present, the precision measurement methods of displacement mainly include electrical measurement, optical measurement and microscopic measurement. In electrical measurement, the capacitance micrometer can be used to measure the displacement of piezoelectric ceramics with high precision, and the positioning accuracy is within 5nm, but the accuracy of the detection circuit will de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06T7/00G06T7/60G06T7/73
CPCG06T7/0004G06T7/60G06T7/73G06T2207/10012
Inventor 薛勃尹若楠何洋佘美娜
Owner NORTHEAST FORESTRY UNIVERSITY
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