Method for growing thin film with continuously adjustable optical constants

Abstract

The invention belongs to the field of film growth, and particularly relates to an optical constant continuously adjustable film growth method which comprises the following steps: preparing a precursor solution; performing surface treatment on the substrate; after the treatment is completed, a layer of uniform liquid film is adsorbed and grown on the substrate; placing the substrate on which the layer of uniform liquid film is adsorbed and grown in a furnace tube at 300-400 DEG C for low-temperature heat treatment; in order to improve the efficiency and the film quality, after the low-temperature heat treatment is completed, the operations of liquid film growth and low-temperature heat treatment can be repeated to obtain a thicker film layer; the temperature of the furnace tube is increased to 800-1300 DEG C for high-temperature heat treatment, and then the optical thin film with the continuously adjustable optical constant is obtained; by changing the components of the precursor solution, the film deposition condition and the heat treatment condition, the optical constant is continuously adjustable, so that the film system structure of the filter film can be greatly simplified, and the process time and cost are shortened.

Description

technical field [0001] The invention belongs to the field of thin film growth, and in particular relates to a thin film growth method with continuously adjustable optical constants. Background technique [0002] Optical thin films, such as reflective films, anti-reflection films, and filter films, are important components of optical devices, and play an important role in many application fields such as lasers, optical communications, medicine, criminal investigation, and biochemistry. The optical constant of the optical film has a great influence on the structural design of the optical film system. The existing optical film is usually composed of multiple layers with different optical constants, usually 10-30 layers, and some up to 100 layers; And the film layers with different optical constants use different materials, and the optical constants of the same material are usually affected by process methods, equipment, and process parameters, but the optical constants of optic...

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Problems solved by technology

The optical constant of the optical film has a great influence on the structural design of the optical film system. The existing optical film is usually composed of multiple layers with different optical constants, usually 10-30 layers, and some up to 100 layers; And the film layers with different optical constants use different materials, and the optical constants of the same material are usually affected by process methods, equipment, and process parameters, but the optical constants of optical films usually fluctuate in a small range

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