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Detector responsivity test structure, method and device

A technology for testing structure and responsivity, applied in the direction of instruments, etc., can solve problems such as troublesome operation, low responsivity accuracy of photodetector 3, low test efficiency, etc., and achieve the effect of improving efficiency and accuracy

Pending Publication Date: 2022-04-12
UNITED MICROELECTRONICS CENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the above requirements, the test of the responsivity of the photodetector 3 based on the detector responsivity test structure needs to be carried out in two stages, that is, the measurement of the insertion loss and the measurement of the parameters related to the responsivity. After the insertion loss measurement is completed, the detector response needs to be changed. The connection method of the components of the responsivity test structure is cumbersome to operate and the test efficiency is low; in addition, the insertion loss will change after the connection method of the components of the detector responsivity test structure is changed, that is, the insertion loss measured first will be different from the subsequent There is an error between the actual insertion loss during measurement, which makes the accuracy of the photodetector 3 responsivity test lower

Method used

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  • Detector responsivity test structure, method and device
  • Detector responsivity test structure, method and device
  • Detector responsivity test structure, method and device

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Embodiment Construction

[0030] The technical solution of the detector responsivity testing structure provided by the present invention will be explained and described in detail below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0031] figure 2It is a schematic circuit diagram of the detector responsivity test structure and device according to the embodiment of the present invention. This embodiment specifically discloses a detector responsivity test structure, which is used to test the responsivity of the optical detector 3. The embodiment of the present invention takes the silicon photonics chip detector as the test object as an example for illustration. The test object is not limited, the d...

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Abstract

The invention relates to the field of testing equipment, in particular to a detector responsivity testing structure which comprises a first light guide unit, a second light guide unit, a first light transmission part and a second light transmission part, and the first light guide unit and the second light guide unit are both used for receiving and outputting light signals. The first light guide unit is optically connected with the second light guide unit, one end, close to the second light guide unit, of the first light guide unit is optically connected with one end of the first light transmission part, and one end, close to the first light guide unit, of the second light guide unit is optically connected with one end of the second light transmission part. Because the detector responsivity test structure is not changed in the test process, only the input position of the light needs to be changed, the efficiency of the responsivity test of the optical detector can be improved, the insertion loss of the first light guide unit and the insertion loss of the second light guide unit can be counteracted during calculation, and the accuracy of the responsivity test of the optical detector can be improved.

Description

technical field [0001] The invention relates to the field of test equipment, and more specifically, the invention relates to a detector responsivity test structure. Background technique [0002] A photodetector is a tool used to detect light or other electromagnetic radiation energy. Before using the tool, it is usually necessary to measure the responsivity of the photodetector through a detector responsivity test structure. [0003] refer to figure 1 The detector responsivity test structure includes an input grating coupler 1 and an output grating coupler 2, and the input grating coupler 1 and the output grating coupler 2 are connected through a waveguide. When it is necessary to measure the responsivity of the photodetector 3, first use the current detector responsivity test structure to measure the insertion loss between the input grating coupler 1 and the output grating coupler 2, and then connect the output grating coupler 2 to the waveguide The connection is disconne...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D18/00
Inventor 肖志雄胡志朋李江冯俊波
Owner UNITED MICROELECTRONICS CENT CO LTD