Detector responsivity test structure, method and device
A technology for testing structure and responsivity, applied in the direction of instruments, etc., can solve problems such as troublesome operation, low responsivity accuracy of photodetector 3, low test efficiency, etc., and achieve the effect of improving efficiency and accuracy
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[0030] The technical solution of the detector responsivity testing structure provided by the present invention will be explained and described in detail below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.
[0031] figure 2It is a schematic circuit diagram of the detector responsivity test structure and device according to the embodiment of the present invention. This embodiment specifically discloses a detector responsivity test structure, which is used to test the responsivity of the optical detector 3. The embodiment of the present invention takes the silicon photonics chip detector as the test object as an example for illustration. The test object is not limited, the d...
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