Preparation method of micro-lens array, micro-lens array, system and equipment

A micro-lens array and micro-lens technology, applied in lenses, instruments, optics, etc., can solve the problem of difficult to achieve nano-scale micro-lens surface topography processing, difficult to correct micro-lens defects such as aberration and chromatic aberration, and limited template processing methods, etc. problem, to achieve the effect of convenient wide-angle imaging, good shaping ability and adhesion, and low aberration

Pending Publication Date: 2022-04-12
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology

[0004] Common microlens manufacturing methods include thermal reflow method, overmolding method, and thermal reflow method. The molten droplets formed by the solid-liquid transition three-phase line angle are used as microlenses. The radius of curvature can be adjusted according to parameters such as volume and temperature. Although the method is suitable for large-scale manufacturing, it is difficult to cor

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  • Preparation method of micro-lens array, micro-lens array, system and equipment
  • Preparation method of micro-lens array, micro-lens array, system and equipment
  • Preparation method of micro-lens array, micro-lens array, system and equipment

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[0047] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of this application.

[0048] Reference herein to "one embodiment" or "an embodiment" refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present application. In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "top", "bottom" etc. is based on the orientation or positional relationship shown in the drawings, and is only for It ...

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Abstract

The invention relates to the technical field of micro-nano device preparation, in particular to a preparation method of a micro-lens array, the micro-lens array, a system and equipment. The method comprises the following steps: acquiring a flexible substrate; carrying out pretreatment on the flexible substrate; a micro lens printing material is arranged on the preprocessed flexible substrate; and carrying out additive printing on the micro-lens material on the flexible substrate according to a preset micro-lens structure to obtain a flexible micro-lens array. According to the preparation method of the micro-lens array, large-area array manufacturing of the micro-lens array on the flexible substrate is realized by using an additive manufacturing method. The obtained micro-lens array has the characteristics of low aberration, high light transmission and good structural stability. Besides, the flexible substrate is preprocessed, so that the flexible substrate has good shaping capability and adhesion, cylindrical surface bending or spherical surface bending can be realized, and wide-angle imaging of the micro-lens array is facilitated.

Description

technical field [0001] The invention relates to the technical field of preparation of micro-nano devices, in particular to a preparation method of a micro-lens array, a micro-lens array, a system and equipment. Background technique [0002] The microlens array is an important and basic optical element that constitutes a micro-optical system. It is an array composed of a series of tiny microlenses with apertures ranging from a few microns to hundreds of microns in a certain arrangement. Because microlens has the advantages of small size, easy mass production, small transmission loss, can be made into an array form, and has special functions, it is widely used in micro-components in micro-optical systems, optical and neural network computing, and optical parallel processing systems. Interconnect elements in wide-field and infrared imaging systems, diffractive elements in optical filtering and material processing systems, subwavelength grating structures for anti-reflection and...

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Application Information

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IPC IPC(8): G02B3/00
Inventor 陶虎维帅秦楠
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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