Anti-chromatic aberration anti-reflection film coating equipment
A coating equipment and anti-reflection coating technology, which is applied in the field of sputter coating and can solve problems such as chromatic aberration of anti-reflection coatings
Pending Publication Date: 2022-04-15
万津实业(赤壁)有限公司
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Problems solved by technology
[0004] Based on this, it is necessary to provide an anti-chromatic aberration anti-reflection film coating equipment, which aims to solve the problem of chromatic aberration in the anti-reflection film existing in the prior art
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[0030] In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the application; the terms used herein are only for the purpose of describing...
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The invention relates to anti-chromatic-aberration anti-reflection film coating equipment which comprises a machine body, a sputtering assembly, a bias assembly and a hanging plate. The machine body is internally provided with a containing cavity and fixedly provided with a first magnet. The sputtering assembly comprises a radio frequency ion source; the at least one bias assembly is provided with a second magnet, rotates relative to the machine body around the central axis of the machine body in a controlled manner, and rotates relative to the first magnet to generate positive bias; each hanging plate is controlled to rotate around the central axis of the machine body relative to the machine body so as to circularly pass through a connecting line of each sputtering assembly and the central axis of the machine body, and each hanging plate is connected with the bias assembly in a one-to-one correspondence manner, so that the local area of the hanging plate is located in the positive bias electric field when the hanging plate passes through the connecting line of the radio frequency ion source and the central axis of the machine body. According to the scheme, the magnetic field is utilized, the magnetic induction lines are cut to form the positive bias voltage, and the local area of the hanging plate is located in the positive bias voltage field, so that the refractive index is increased due to insufficient reaction of the area, the coating effect is naturally transited, and chromatic aberration is avoided.
Description
technical field [0001] The present application relates to the field of sputtering coating technology, in particular to an anti-chromatic aberration and anti-reflection film coating equipment. Background technique [0002] Sputtering coating is a technology that uses energetic particles to bombard the surface of the target in a vacuum, so that the bombarded particles are deposited on the substrate. Typically, a low-pressure noble gas glow discharge is used to generate incident ions. In recent years, anti-reflection film has been used on the cover of flat panel PAD (tablet computer), but its ink area is prone to color difference under strong light. The single-sided reflectance in the 700nm visible light band is close to 4.2%, and the reflectance curve at this time is as follows figure 1 A straight line is shown, and the reflectance curve of the glass after coating the reflective film becomes as follows figure 2 When the uneven curve shown is illuminated under strong light,...
Claims
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IPC IPC(8): C23C14/35G02B1/11
Inventor 杨鹏
Owner 万津实业(赤壁)有限公司