Crystal pulling device of hard-shaft single crystal furnace

A single crystal furnace and hard shaft technology, applied in the directions of single crystal growth, single crystal growth, crystal growth, etc., can solve the problem of large crystal rod shaking, reduce crystal rod shaking, improve crystal pulling quality, and reduce accumulation effect of error

Active Publication Date: 2022-04-26
ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] This application provides a crystal pulling device for a hard-axis single crystal furnace, which solves the technical problem that the crystal rod shakes greatly during crystal pulling in the prior art; The technical effect of shaking the small crystal rod

Method used

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  • Crystal pulling device of hard-shaft single crystal furnace
  • Crystal pulling device of hard-shaft single crystal furnace
  • Crystal pulling device of hard-shaft single crystal furnace

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Embodiment Construction

[0039] The serial numbers assigned to components in this document, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequence or technical meaning. The "connection" and "connection" mentioned in this application all include direct and indirect connection (connection) unless otherwise specified. In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description , rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and th...

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Abstract

The invention relates to a single crystal furnace, in particular to a crystal pulling device of a hard shaft single crystal furnace, which comprises a shaft main body, the shaft main body is positioned in a single crystal furnace body, the shaft main body and the single crystal furnace body are coaxially arranged, and the shaft main body has the freedom degree of moving in the vertical direction and the freedom degree of rotating around a shaft; the lifting mechanism is connected to the rack and used for driving the shaft main body to ascend or descend; the rotating mechanism is connected to the rack and used for driving the shaft body to rotate around the shaft. The shaft main body is used for replacing a soft tungsten alloy cable in the prior art for crystal pulling, and the shaft main body is hard and cannot shake in the crystal rotating process, so that the crystal pulling quality is improved, and the technical problem that a crystal bar shakes greatly during crystal pulling in the prior art is solved; the technical effect of reducing crystal bar shaking is achieved.

Description

technical field [0001] The present application relates to the field of single crystal furnaces, in particular to a crystal pulling device for hard shaft single crystal furnaces. Background technique [0002] With the development of the semiconductor industry and the photovoltaic industry, there is a greater market demand for monocrystalline silicon. At present, the growth of monocrystalline silicon by the Czochralski method is the most widely used technology for the production of monocrystalline silicon. The single crystal furnace is the core production equipment. The single crystal furnace includes a heater, a crucible and a pulling head. The silicon material placed in the crucible is heated to the melt by the heater, and the pulling head immerses the seed crystal into the silicon melt. In the body, a single crystal rod is grown and pulled under the seed crystal. [0003] In the prior art, flexible shafts such as tungsten alloy cables are usually used as the pulling shaft ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00C30B15/30C30B29/06
CPCC30B15/00C30B15/30C30B29/06
Inventor 郑丽霞陆关斌郑坚超叶钢飞叶雷江梁晋辉
Owner ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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