Synchronous interference measurement method and system for speed, distance and three-dimensional shape of rotating body

Abstract

The invention provides a method and system for synchronously measuring the speed, distance and three-dimensional absolute morphology of a rotating object based on line laser interference, and the method comprises the following steps: arranging a to-be-measured object on a motor main shaft, starting a motor, setting the rotating speed of the main shaft, and enabling the to-be-measured object to rotate along with the motor main shaft; the scattered light image acquisition module is used for acquiring scattered light on the surface of the measured object to obtain scattered light images on the surface of the measured object corresponding to different moments. According to the invention, two linear laser interference fringe measurement bodies which are mutually inclined to form a fixed angle are formed on the surface of a measured object by using a Mach-Zehnder interferometer, a plano-convex cylindrical lens, a dual-wavelength laser light source and two narrow-band optical filters, and a linear relation between the surface distance of the measured object and the phase difference of scattered light is established; the limitation of the traditional laser Doppler velocity measurement principle is broken through, mechanical scanning is not needed, multi-point simultaneous measurement of the velocity and the distance of the moving surface is achieved, and on the basis, the three-dimensional absolute morphology of an object in a rotating state can be measured at the same time through a related algorithm.

Description

technical field [0001] The present invention relates to the field of test and measurement technology and instrument technology, in particular, to a method for synchronous interferometric measurement of rotating body velocity, distance and three-dimensional shape Background technique [0002] Existing measurement technologies, usually using contact three-coordinate measuring machine and probe measurement technology, cannot measure fast-moving objects; non-contact, triangulation-based laser triangulation sensors, structured light projection technology and traditional interferometric methods Low-coherence interferometry, conoscopic holography, dispersive white light interferometry, and absolute distance interferometry can only measure distances, so an inherent defect of these measurement techniques is that they can only measure the surface profile of rotating objects, and cannot achieve absolute shape measurement. Measurement (measurement of angle-resolved absolute diameter), b...

AI Technical Summary

Problems solved by technology

[0002] Existing measurement technologies, usually using contact three-coordinate measuring machine and probe measurement technology, cannot measure fast-moving objects; non-contact, triangulation-based laser triangulation sensors, structured light projection technology and traditional interferometric methods Low-coherence interferometry, conoscopic holography, dispersive white light interferometry, and absolute distance interferometry can only measure distances, so an inherent defect of these measurement techniques is that they can only measure the surface profile of rotating objects, and cannot achieve absolute shape measurement. Measurement (measurement of angle-resolved absolute diameter), because these technologies cannot measure the position of the axis of rotation as a reference; existing methods and systems cannot simultaneously measure the velocity, distance, and three-dimensional absolute topography of multiple points on the surface of a rotating object with only a single sensor

Images