Repulsion mesh and deposition method
A deposition method and deposition process technology, used in coatings, gaseous chemical plating, discharge tubes, etc., can solve problems such as falling, particle contamination, affecting device quality, etc., and achieve the effect of reducing undercut and improving material interface density
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[0020] Plasma-enhanced deposition can generate a localized plasma between a showerhead or gas distributor and a substrate support during material deposition, such as material deposition of silicon oxide or other silicon-containing materials. When the precursor is activated in the plasma, deposition material can be formed and deposited on the substrate. While this deposition is occurring, additional deposition may also occur in the processing chamber, such as dead spaces within the chamber where fluid flow may not be ideal. Furthermore, the process of plasma generation may create a shell over the substrate that may circulate and trap certain particles. When the plasma is turned off, material attached to chamber components may flake off and fall onto the substrate, and particles previously trapped in the plasma may also fall onto the substrate. These additional particles can create defects in the deposited film, which can degrade or otherwise affect device quality.
[0021] Co...
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