Clean room fluid energy distribution control system
A control system and energy distribution technology, applied in the general control system, control/regulation system, gas/liquid distribution and storage, etc., can solve the problems of low measurement accuracy, cleaning blind spots, incomplete cleaning, etc., and reach the heating area Larger, fewer pipe connections, less risk of contamination
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[0029] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.
[0030] On the contrary, this application covers any alternatives, modifications, equivalent methods and schemes within the spirit and scope of this application as defined by the claims. Further, in order to make the public have a better understanding of the application, some specific details are described in detail in the detailed description of the application below. The present application can be fully understood by those skilled in the art without the description of these detailed parts.
[0031] The following will combine Figure 1-3 A clean room fluid energy distrib...
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