Semiconductor device and preparation method thereof

Abstract

The invention provides a semiconductor device and a preparation method thereof. According to the semiconductor device, in the first direction, the extension length of the electric injection region is smaller than the extension length of the waveguide groove, carriers cannot be massively accumulated on the edge of the electric injection region, peaks with high power in the edge region in near-field light spots are eliminated, cavity surface damage caused by too strong local light field is avoided, and the reliability of the device is improved; 2, in the first direction, the second groove region is closer to the cavity surface on the same side than the first groove region; the second groove region in the stacking direction is shallower than the first groove region, the limiting effect of the vicinity of the cavity surface on the light field is reduced, therefore, high-order modes in the multimode laser limited in the ridge waveguide are diffused in the second groove region and consumed to a certain degree, the number of the modes is reduced, and the horizontal far-field divergence angle of the light beam is reduced. 3, in the first direction, the third groove region is closer to the cavity surface on the same side than the second groove region; in the stacking direction, the third groove region is deeper than the second groove region, and the third groove region plays a stronger role in limiting carriers when electric injection is carried out on the semiconductor device.

Description

technical field [0001] The application belongs to the technical field of semiconductors, and in particular relates to a semiconductor device and a preparation method thereof. Background technique [0002] Semiconductor devices are widely used due to their small size, light weight, low voltage, and high power. For example, it is widely used in optical fiber communication, optoelectronic integration, optical disc storage, pump light source, atmospheric environment detection, trace toxic gas analysis and molecular spectroscopy, etc. It is closely related to human life and brings a lot of convenience to people's life. [0003] A conventional semiconductor device has a ridge structure which belongs to a waveguide structure for confining carriers and an optical field. However, there are the following technical problems when limiting the light field: 1. There is a strong power peak in the near-field light spot, which is likely to cause damage to the cavity surface and cause device...

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Problems solved by technology

[0004] The purpose of this application is to overcome the defects of light field limitation in the prior art, to provide a semiconductor device and its preparation method, the semiconductor device and its preparation method It can overcome the defects of optical field limitation in the prior art, and at the same time solve the reliability problem of semiconductor devices when injecting large currents

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