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4f system-based telecentric scanning device

A scanning device and telecentric technology, which is applied in the field of optical scanning, can solve the problems of telecentric beam angle deviation and non-uniform mirror size and specification, so as to reduce the moment of inertia, eliminate the telecentric beam angle deviation, and reduce the requirements Effect

Pending Publication Date: 2022-05-27
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] In view of the above defects or improvement needs of the prior art, the present invention provides a telecentric scanning device based on the 4f system, aiming at solving the problem that the two mirrors in the prior art cannot be placed at the object focal plane of the field lens at the same time The resulting telecentric beam angle offset, and the problem that the sizes and specifications of the two mirrors are not uniform

Method used

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  • 4f system-based telecentric scanning device
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  • 4f system-based telecentric scanning device

Examples

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Embodiment 1

[0043] The three-dimensional schematic diagram of a telecentric scanning device based on the 4f system disclosed in the present invention is as follows: Figure 5 As shown, it includes a first mirror 12 , a first lens 13 , a second lens 14 , a second mirror 15 and a field lens 16 arranged along the optical path, and a workpiece 17 located on the focal plane of the field lens 16 on the image side.

[0044] The first reflecting mirror 12 and the second reflecting mirror 15 are used to form two rotating mirrors of the scanning device; the first lens 13 and the second lens 14 are two aspherical biconvex lenses, and the focal lengths are f respectively 1 =60mm, f 2 =30mm, used to form a 4f system; the field lens 16 is a telecentric f-theta field lens, which is used to realize the image-side telecentric scanning of the light beam.

[0045] The two-dimensional schematic diagram of the above-mentioned scanning device is as follows: Image 6 As shown, when the first reflecting mirror...

Embodiment 2

[0052] The three-dimensional schematic diagram of a telecentric scanning device based on the 4f system disclosed in the present invention is as follows: Figure 5 As shown, it includes a first mirror 12 , a first lens 13 , a second lens 14 , a second mirror 15 , a field mirror 16 , and a workpiece 17 . The first lens 13 and the second lens 14 are two cylindrical biconvex lenses, and the focal lengths are f respectively 1 =60mm, f 2 =30mm, used to form a 4f system.

[0053] The remaining parts are consistent with the first embodiment, and the scanning process consistent with the first embodiment can still be implemented.

Embodiment 3

[0055] On the basis of the first embodiment, the focal point on the optical axis between the first lens 13 and the second lens 14 is wrapped with a vacuum cavity 22, which is used to prevent ionization and plasma caused by the focusing of the high-power laser inside the 4f system in the air. Breakdown and other physical processes can avoid the influence of various physical processes on beam transmission, beam quality and beam power, as well as potential safety hazards.

[0056] The vacuum chamber 22 is cylindrical, its bottom surface and top surface are round glass that can transmit light, and the side walls are also light-transmitting glass. With good pressure resistance, it can isolate the entry of external air. The light beam passing through the first lens 13 is incident into the vacuum chamber 22 , and after being focused in the vacuum chamber 22 , it diverges and exits, and then enters the second lens 14 .

[0057] The rest of the remaining parts are consistent with the f...

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Abstract

The invention relates to the field of optical scanning, in particular to a telecentric scanning device based on a 4f system, which comprises a first reflecting mirror, a second reflecting mirror and a field lens which are arranged on a light path, and is characterized by further comprising a first lens and a second lens which are sequentially arranged between the first reflecting mirror and the second reflecting mirror along the light path, the first reflecting mirror and the second reflecting mirror are deflecting mirrors with non-collinear fixed rotating shafts; the focal lengths of the first lens and the second lens are f1 and f2 respectively; the first reflecting mirror, the first lens, the second lens and the second reflecting mirror are sequentially arranged on the same optical axis at intervals of f1, f1 + f2 and f2; the object space focus of the field lens is located on the second reflector. By combining the design of a 4f system, the telecentric beam angle deviation caused by the fact that two reflectors in a two-dimensional laser scanning device cannot coincide is eliminated, the beam scanning precision is improved, the structure is simple and ingenious, and the production cost is effectively controlled.

Description

technical field [0001] The invention belongs to the technical field of optical scanning, and more particularly, relates to a two-dimensional optical scanning device. Background technique [0002] Telecentric beam scanning has a wide range of application values ​​in the fields of laser precision machining, high-precision optical imaging and optical measurement. At present, the combination of galvanometer and telecentric f-theta field mirror is widely used to realize two-dimensional scanning of light beam. The light beam passes through a pair of mirrors with orthogonal rotation axes, and then cooperates with the field mirror to focus on the scanning plane, and the two mirrors rotate according to a certain law, thereby realizing the scanning process. [0003] refer to figure 1 As shown, an ideal telecentric f-theta field lens can refract a parallel beam of any angle incident through the object-side focal point F into an image-side telecentric exit, and the emergent beam is ve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/10G02B13/22G02B13/18
CPCG02B26/105G02B26/101G02B13/22G02B13/18
Inventor 邓磊敏徐新科熊伟段军邵健
Owner HUAZHONG UNIV OF SCI & TECH
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