Piezoelectric-photoelastic phase shifter and optical gyroscope SiN integrated chip

Abstract

The embodiment of the invention discloses a piezoelectric-photoelastic phase shifter and an optical gyroscope SiN integrated chip. The phase shifter comprises a metal lead, a top electrode, a piezoelectric film material, a bottom electrode, a SiO2 intermediate layer, a SiN waveguide, a SiO2 cladding and a Si substrate. The metal lead is respectively connected with the top electrode and the bottom electrode; the piezoelectric film material is positioned between the top electrode and the bottom electrode; the SiO2 intermediate layer is arranged between the bottom electrode and the SiN waveguide, and the SiO2 cladding and the Si substrate are sequentially arranged below the SiN waveguide. According to the invention, the piezoelectric film material layer is deposited at the top or the bottom, high-bandwidth and low-power-consumption phase modulation can be realized in a visible light-near infrared band, and the optical fiber has low optical insertion loss and a high optical power threshold. The stability and reliability of the fiber-optic gyroscope are improved, the miniaturization of the fiber-optic gyroscope is realized, and the cost of the fiber-optic gyroscope is reduced.

Description

technical field [0001] The invention relates to the technical field of integrated optics and inertial sensing, in particular to a piezoelectric-elastic-optical phase shifter and an optical gyro SiN integrated chip. Background technique [0002] Due to the precise measurement of angular displacement, high-sensitivity gyroscopes play a vital role in a range of fields, such as aviation navigation, robotics, unmanned vehicle driving, and geographic mapping. broad needs. Optical gyroscopes based on the Sagnac effect have received extensive attention due to their high sensitivity and have developed into a multi-purpose mature technology. Compared with the traditional mechanical gyroscope based on the conservation of angular momentum, the optical gyroscope has no motion module, so it is not affected by gravity, shock and vibration, which means that no special gimbal suspension or packaging means is required. [0003] As a typical representative of optical gyroscope, fiber optic g...

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Problems solved by technology

But traditional LiNbO based on proton diffusion process 3 There are also some shortcomings in the waveguide integrated chip: (1) The low refractive index difference between the waveguide and the cladding leads to weak optical field confinement ability, which requires a large distance between the metal electrode and the waveguide, thereby reducing the electro-optic modulation efficiency ; (2) Because LiNbO 3 The optical anisotropy of the optical path restricts the degree of freedom of the optical path layout to one dimension, thereby limiting the further reduction of the optical path size and the further increase of the integration degree of freedom; (3) The traditional manufacturing method of lithium niobate optical waveguide is the proton exchange method. There are strict requirements on the time and temperature of proton exchange, the characteristics of the exchange medium and the temperature and time of annealing, the preparation process is complex and the cost is high; (4) based on LiNbO 3 The electro-optic modulator is affected by the photorefractive effect, and the optical signal will be distorted, and this distortion will continue to deteriorate as the optical power increases

On the other hand, at the same modulation rate, elasto-optic modulators have much lower power consumption

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