Anti-sputtering Faraday cup and preparation method thereof

A Faraday cage and anti-sputtering technology, which is applied in manufacturing tools, radiation measurement, X/γ/cosmic radiation measurement, etc., can solve pollution and other problems, and achieve accurate measurement, accurate beam adjustment equipment, and easy maintenance.

Pending Publication Date: 2022-07-22
INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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Problems solved by technology

[0004] In view of the above problems, the purpose of the present invention is to provide an anti-sputtering Faraday cage that does not require a large area of ​​insulating ceramics, and is insulated by vacuum between the bias electrode and the collecting electrode and between the ground, and only a small part of the ceramics is kept away from the earth. The beam itself and the sputtering beam path can effectively solve the problem of ceramic contamination

Method used

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  • Anti-sputtering Faraday cup and preparation method thereof

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Embodiment 1

[0035] like figure 1 The anti-sputtering Faraday cylinder provided by the first embodiment of the present invention includes a bias electrode 101, a collector electrode 102, a diaphragm 104 and a shielding cylinder 105. The action of secondary electrons finally makes the current intensity measurement more accurate; the collecting electrode 102 is used to block and collect all the incident beam currents, and export the charge to the data acquisition device; the diaphragm 104 is used to protect the bias electrode 101, preventing the beam from bombarding the bias electrode 101 directly; the shielding cylinder 105 is used to isolate the external complex electromagnetic environment to ensure accurate measurement values ​​and low noise. The bias electrode 101 includes a cylindrical shape with both ends open and a first flange extending outward from the top. A first threaded hole is respectively provided on the front, rear, left and right sides of the first flange. The bias electro...

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Abstract

The invention relates to an anti-sputtering Faraday cylinder which comprises a bias electrode, a collecting electrode, a diaphragm and a shielding cylinder. The bias electrode is in the shape of a cylinder with two open ends, and a first flange extending outwards is formed at the top of the bias electrode. The collecting electrode is in a cylindrical shape, the top end of the collecting electrode is open, the bottom end of the collecting electrode is closed, the diaphragm is in a cylindrical shape, the diaphragm is arranged on the outer side of the bias electrode in a sleeving mode, and the bias electrode is fixed to the inner wall of the diaphragm through the first flange. The bottom end of the shielding cylinder is closed, the shielding cylinder is arranged on the outer side of the collecting electrode in a sleeving mode, the collecting electrode is fixed to the inner wall of the shielding cylinder through the second electrode, and the bottom of the shielding cylinder is separated from the bottom end of the collecting electrode. The bias electrode and the collecting electrode as well as the bias electrode and the ground are insulated through vacuum, and only a small part of ceramic is far away from a beam and a sputtering beam path, so that the problem of ceramic pollution can be effectively solved.

Description

technical field [0001] The invention relates to the field of charged particle beam current measurement, in particular to an anti-sputtering Faraday cylinder and a preparation method thereof Background technique [0002] The Faraday cylinder is a basic device for measuring the current intensity of charged particle beams. [0003] The bias electrode and the collector electrode of the existing Faraday cylinder are insulated from each other and from the ground by insulating ceramics. The main problem of this technology is that the insulating ceramics are easily polluted by the particle beam itself and the sputtering beam generated by it, resulting in the degradation of the insulation performance between the bias electrode and the collector electrode and the insulation performance to the ground, which leads to the difficulty of bias loading. , and the beam intensity measurement is not accurate, which is also the main bottleneck affecting the measurement accuracy of this Faraday ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01T1/29B25B27/00
CPCG01T1/29B25B27/00
Inventor 冯永春毛瑞士徐治国胡正国尹炎康新才赵铁成
Owner INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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