Planar capacitive high-pressure-resistant miniature pressure sensor and manufacturing method thereof

Abstract

The invention discloses a planar capacitive high-pressure-resistant miniature pressure sensor and a manufacturing method thereof. The sensor is provided with a dielectric layer, an electrode layer and an insulating substrate from top to bottom, the electrode layer comprises a positive sensing electrode, a negative sensing electrode, an air gap and a pin circuit, and the air gap comprises an S-shaped structure. The electrode layer can be directly prepared by methods of focused ion beam deposition / 3D printing / metal printing and the like, and can also be prepared by magnetron sputtering / electron beam evaporation / electroplating and the like through a mask plate with a preset shape. When external force is applied to the surface of the sensor, the dielectric layer constructs a charge exchange channel between the two electrodes of the sensor, the capacitance value is increased due to the increase of the charge exchange capacity, the sensor has the characteristics of high sensitivity, wide detection range and the like, and the sensor has stronger adaptability to transverse deformation due to the S-shaped structure. The sensor is simple in structure, and is suitable for high-voltage detection scenes with size limitation in the fields of aerospace, industrial equipment and the like.

Description

technical field [0001] The invention belongs to the field of miniature pressure sensors, in particular to a high-voltage-resistant miniature pressure sensor based on the principle of plane capacitance and a manufacturing method thereof. Background technique [0002] Pressure sensors are the most commonly used sensors in industrial practice. With the process of industrial modernization and the development of industrial equipment technology, higher requirements are placed on the performance of pressure sensors. In addition, with the increase in the complexity and precision of equipment, the limitation of the internal space of components puts forward higher requirements on the size of the sensor. Traditional pressure sensors are large in size, relatively low in sensitivity, poor in long-term stability, and have a small applicable temperature range. When faced with pressure detection scenarios with size constraints and extreme environments, traditional pressure sensors have been...

AI Technical Summary

Problems solved by technology

However, the current miniature pressure sensors still have the problems of small pressure detection range and insufficient reliability, and it is difficult to meet the application requirements of high pressure detection scenarios.

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