Precise rotating shaft system rotation error in-situ separation method based on H-type six-point method

Abstract

The invention relates to an H-type six-point method-based rotation error in-situ separation method for a precise rotating shaft system. The method comprises the following steps of: firstly, reconstructing a transfer function with an offset factor, and calculating an amplification coefficient G (k) from harmonic uncertainty of a sensor to harmonic uncertainty of roundness error based on the transfer function; and according to the G (k), predicting rotation error separation uncertainty caused by rounding error and noise, and calculating a sampling period and a measurement angle which enable the overall uncertainty of the rotation error to be the lowest. And secondly, constructing an H-type six-point precision rotating shaft system rotation error in-situ separation measurement system. And finally, separating the roundness error of the standard measuring disc and the space error of the ultra-precise rotating shaft system through an improved algorithm, wherein the space error comprises a radial error and a tilt error. According to the method, under the condition of a limited sampling period, rotation error separation uncertainty caused by rounding errors and noise can be reduced, and on-line and real-time separation of radial errors and inclination errors of the ultra-precise rotating shaft system is achieved under the on-load state.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacture and measurement, and relates to an in-situ separation method for the rotation error of a precision rotary shaft system based on an H-type six-point method. Background technique [0002] With the continuous improvement of the level of the equipment manufacturing industry, high-end equipment with precision rotating shafts as the main components, such as high-precision machine tool spindles, laser scanners, precision CT, total stations and other equipment, play an increasingly prominent role in the industry. The rotation error of the rotating shaft system is the key factor affecting its accuracy. Taking high-precision machine tools as an example, the precision rotating shaft system is the core of high-precision machine tools. Its precision and spatial operation state directly affect the precision of machining, and can determine the level of precision of parts used in other in...

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Problems solved by technology

[0003] Although people have done a lot of research work on the separation method of the rotation error, most of the research is mainly on the separation method of the rotation error of the precision rotating shaft under the no-load state, and most of the methods cannot realize the real-time analysis of the radial error and the tilt error. separate

At present, most of the measurement devices for the separation of rotary errors use standard spheres or standard columns as standard parts to measure the spatial error of the rotating shaft system. When using standard spheres for five-degree-of-freedom space error measurement, two standard spheres are required for measurement, and only The measurement is carried out under the no-load state of the rotating shaft system, not suitable for online measurement

When using cylindrical standard parts for measurement, it is necessary to deduce the yaw angle error of the main shaft according to the radial motion error at different positions of the main shaft axis, which cannot realize the real-time separation of the tilt error and the radial error. It is obviously not feasible for the system

[0004] In the actual process, the rotation error separation of the precision rotating shaft system usually requires real-time online separation. Since the system has high requirements for timeliness, in order to meet the real-time requirements of error separation and ensure that fast Fourier transform can be performed, the sampling period N cannot exceed Therefore, under the limited sampling period, there is a deviation between the measurement position and the position of the estimated value of the roundness error, which will cause the problem of weakening the accuracy of the rotation error of the rotating shaft system and increasing the uncertainty of error separation

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