Electrically-controlled light spot shaping and power adjusting device, system and method based on diaphragm

Abstract

The invention discloses an electrically-controlled light spot shaping and power adjusting device, system and method based on a diaphragm, and belongs to the field of variable diaphragms and light spot shaping and power adjusting. The optical power measuring assembly is used for converting an optical signal into an electric signal; the microcontroller unit is used for calculating data of the optical power measuring assembly, communicating with an upper computer and sending a signal to the driving assembly to control the variable diaphragm assembly; the upper computer is used for receiving, storing and displaying an optical power set value of a thin strip-shaped light spot, displaying a strip-shaped light spot power actual measurement value corresponding to a thin cylinder matched with the transmission wheel, displaying a matching state of the transmission wheel and the thin cylinder, receiving and displaying stepping displacements set for a motor 1D, a motor 2D and a motor 3D and issuing the stepping displacements to the micro-control unit; the variable diaphragm assembly is used for shaping the light spots and adjusting the power of the light spots; the device is simple in structure, easy to implement, capable of measuring adjusted light spots in real time, accurate and convenient.

Description

technical field [0001] The invention belongs to the technical field of variable aperture, light spot shaping and power adjustment, and in particular relates to a diaphragm-based electronically controlled light spot shaping and power adjustment device, system and method. Background technique [0002] In the fields of precision laser micro-processing such as semiconductor devices, photomask manufacturing, and laser writing, it is often necessary to shape and adjust the power of the beam shape of the laser beam, so that the projected or imaged beam presents the required geometric shapes such as circle, Rectangle, etc. or require uniform or regular light power distribution, the device used for light spot shaping is usually a diaphragm. [0003] At present, the mainstream apertures on the market are regular-shaped apertures. Generally, some fixed-shaped apertures of different sizes, such as circles and rectangles, are processed on an opaque base plate. The light hole is used wit...

AI Technical Summary

Problems solved by technology

[0003] At present, the mainstream diaphragms on the market are regular-shaped diaphragms. Generally, some fixed-shaped light holes of different sizes, such as circles and rectangles, are processed on an opaque base plate. The light hole is used with the shading sheet, and the shading sheet is generally of some regular shape, which is suitable for adjusting the light spot with regular optical power distribution, and it is all adjusted for the power of the light spot as a whole. This kind of aperture cannot be continuously adjusted. The application places are relatively limited. These apertures are usually designed for a certain type of product. When processing different products, it is often necessary to redesign the size and shape of the light-transmitting aperture, which increases the cost.

Moreover, for spots with irregular and chaotic optical power distribution, traditional diaphragms combined with shading sheets cannot obtain a spot with consistent optical power distribution, which limits the application and is not flexible enough.

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