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High temp.-resisting plasma cavity resonator

A technology of plasma and resonant cavity, which is applied in the direction of gaseous chemical plating, metal material coating technology, electrical components, etc., can solve the problems of bad deformation service life of the resonant cavity, short continuous working time, frequent maintenance, etc., to achieve Improved high temperature resistance, increased processing power, and the effect of avoiding slag drop

Inactive Publication Date: 2005-05-18
FENGHUO COMM SCI & TECH CO LTD
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Problems solved by technology

Existing plasma resonators usually only have cooling water channels at both ends of the resonator, which not only has a small amount of cooling, but also has uneven cooling distribution, so the continuous working time is short, and it is easy to cause bad deformation of the resonator and affect its service life ; On the other hand, the heat insulation layer is formed by directly covering the shell of the resonant cavity with refractory materials. It is easy to crack and break after rapid cooling and rapid heating, which will cause the problem of slag dropping and polluting the product, and requires frequent maintenance

Method used

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  • High temp.-resisting plasma cavity resonator
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Embodiment Construction

[0011] The embodiments of the present invention are further described below with reference to the accompanying drawings, including a cylindrical resonant cavity shell 4, the resonant cavity shell is made of metal material, and includes an outer cylindrical surface and an inner cylindrical surface, and the middle part is provided with an axial Through hole, a ring-shaped resonant cavity 7 is arranged in the resonant cavity shell, the inner cylindrical surface of the resonant cavity is provided with a power output port 6, and the outer cylindrical surface of the resonant cavity is connected to the power input hole 10, and the power The output hole is generally located in the middle of the resonant cavity shell, and an axial reciprocating circuit cooling water channel 8 is arranged around the periphery and both ends of the resonant cavity shell in the resonant cavity shell, and the cooling water channel at the turning point of the two ends extends inward for a certain distance. , ...

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Abstract

The present invention relates to a high-temp. resistance plasma resonant cavity for PCVD optical fiber preform processing machine tool, including a cylindrical resonant cavity shell body and heat-insulating layer covering exterior of resonant cavity shell, the interior of resonant cavity shell is equipped with a circular resonant cavity, and its different place lies in that the periphery of the resonant cavity and its two end portions are equipped with cooling water channel respectively. It can raise its service life, and can retain the stable and reliable heat-insulating performance.

Description

technical field [0001] The invention relates to a high-temperature-resistant plasma resonant cavity for a PCVD optical fiber preform processing machine tool, which is a further improvement to the existing plasma resonant cavity. Background technique [0002] PCVD or plasma chemical vapor deposition process is one of the main processes for the processing of optical fiber preforms. The processing mechanism of PCVD process is through the direct action of high-frequency microwaves on the reactant gas, causing it to undergo a rapid physical and chemical reaction to form pure silica or Doped silica is deposited directly in the glass state on the inner wall of the quartz tube. The plasma resonator is the key core component for emitting high-frequency microwave energy to complete the above-mentioned process. In the PCVD process, the quartz tube needs to be deposited at a temperature of about 1200 ° C, and the plasma resonator must also work in such a high temperature environment. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/511H05H7/18
Inventor 邓都才朱明华
Owner FENGHUO COMM SCI & TECH CO LTD
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