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Method and system of controlling dummy dispense

A technology of liquid and formula, which is applied in the direction of jet program control, photo-plate-making process coating equipment, photo-plate-making process exposure device, etc., can solve the problems of increasing the manufacturing cost of semiconductor integrated circuits, so as to improve product yield and prevent wafer coating Cloth, prevent re-doing effect

Active Publication Date: 2006-11-22
TAIWAN SEMICON MFG CO LTD
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AI Technical Summary

Problems solved by technology

Therefore, the conventional dispensing process increases the manufacturing cost of semiconductor integrated circuits due to unnecessary dispensing

Method used

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  • Method and system of controlling dummy dispense
  • Method and system of controlling dummy dispense
  • Method and system of controlling dummy dispense

Examples

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Embodiment Construction

[0015] figure 2 A flow chart of a method for controlling fake distribution according to an example of the present invention is shown. exist figure 2 In the preferred embodiment shown, the method includes a storing step 210 , a comparing step 220 , an aborting step 230 , a pseudo-dispensing step 240 , a processing step 250 and a recording step 260 .

[0016] The storage step 210 is used to record the time 211 when the substrate is processed and the time 212 when the liquid is dispensed. In some embodiments, the storing step 210 also records the recipe 213 of the dispensed liquid and the name 214 of the liquid.

[0017] The time 211 when processing the substrate can be, for example, the time in any process when processing the substrate, such as the time of moving in and moving out of the substrate in any process. The substrate can be, for example, a semiconductor wafer substrate, a liquid crystal display substrate [such as a thin film transistor liquid crystal display (TFT ...

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Abstract

The false dispensing of liquids is controlled by recording the time when the substrate is processed, recording the time when the liquid is dispensed, and comparing the time when the substrate is processed with the time when the liquid is dispensed, and generating false dispenses when false dispensing is required. Dispatch signal. A system for controlling pseudo-dispensing of liquids, comprising at least one information storage component for storing the time when a substrate was processed and the time when the liquid was dispensed; at least one processor comparing the time when the substrate was processed with the time when the liquid was dispensed Time to determine whether a false allotment is necessary.

Description

technical field [0001] The present invention relates to a manufacturing method or system of a semiconductor integrated circuit, and in particular to a method and system for controlling liquid dummy dispensing (Dummy Dispense) in the manufacturing of a semiconductor integrated circuit. Background technique [0002] Lithography is an integral part of semiconductor manufacturing. Generally, the lithography process includes the following steps: coating a photoresist layer, exposing to a light source, and developing with a developer. When a light source illuminates the photoresist layer, the irradiated photoresist will transform or generate acid. In contact with a developer, usually an alkaline solution, the irradiated photoresist reacts with the developer, while the non-irradiated photoresist does not react with the developer. In this way, the positive or negative image on the mask will be transferred to the substrate. [0003] When submicron or deep submicron technology is w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20H01L21/00G03F7/00G03F7/16G05B19/43
CPCG03F7/16G03F7/162H01L21/6715
Inventor 吴宏益翁志荣倪中政游奕欣
Owner TAIWAN SEMICON MFG CO LTD
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