Method for calibrating space resolution ratio of high-resolution digital interference instrument
A technology of spatial resolution and calibration method, applied in the field of high-resolution digital interferometer and high-resolution digital interferometer spatial resolution calibration
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[0021] The present invention will be further described below in conjunction with embodiment, but should not limit the scope of protection of the present invention with this.
[0022] The essence of the present invention is to use the digital interference phase difference amplification method to perform phase difference amplification from a model interferogram with λ / 10 wave difference, such as figure 1 As shown, and then select a part of the relatively flat area of the interferogram from the interferogram amplified by the phase difference, and then amplify the phase difference, the spatial resolution with λ / 100~λ / 500 can be calibrated, as shown in figure 2 shown.
[0023] The calibration method of the spatial resolution of the high-resolution digital interferometer of the present invention is carried out according to the following steps:
[0024] 1) Build a Mach-Chendel interferometer, namely M-Z interferometer;
[0025] 2) Use a CCD detector on the M-Z interferometer to ...
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