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Method for calibrating space resolution ratio of high-resolution digital interference instrument

A technology of spatial resolution and calibration method, applied in the field of high-resolution digital interferometer and high-resolution digital interferometer spatial resolution calibration

Inactive Publication Date: 2006-12-27
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The disadvantage of this method is that it requires a hologram reconstruction software and a high-resolution CCD detector. When the magnification is high, the noise of the CCD is also amplified.
At present, in the field of optical precision processing and measurement, interferometry is widely used at home and abroad to measure the wavefront of optical components. far from meeting the needs

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with embodiment, but should not limit the scope of protection of the present invention with this.

[0022] The essence of the present invention is to use the digital interference phase difference amplification method to perform phase difference amplification from a model interferogram with λ / 10 wave difference, such as figure 1 As shown, and then select a part of the relatively flat area of ​​the interferogram from the interferogram amplified by the phase difference, and then amplify the phase difference, the spatial resolution with λ / 100~λ / 500 can be calibrated, as shown in figure 2 shown.

[0023] The calibration method of the spatial resolution of the high-resolution digital interferometer of the present invention is carried out according to the following steps:

[0024] 1) Build a Mach-Chendel interferometer, namely M-Z interferometer;

[0025] 2) Use a CCD detector on the M-Z interferometer to ...

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Abstract

A method for calibrating space resolution of digital interferometer includes setting up Mach- Zehnder interferometer and using CCD detector to shoot an interference pattern with carrier wave fringe , inserting phase sample with accuracy of lambda / 10 in arm of said interferometer and shooting an interference pattern being modulated by sample , carrying Fourier transform for two patterns in computer separately and picking up phase data of two patterns , amplifying them after subtraction , picking up local area from amplified pattern and amplifying the phase difference for it.

Description

technical field [0001] The invention relates to a high-resolution digital interferometer, in particular to a method for calibrating the spatial resolution of a high-resolution digital interferometer. This method allows the use of a lower-precision template, such as λ / 10, where λ is the wavelength, and can be calibrated A digital interferometer with a spatial resolution better than λ / 100. Background technique [0002] In recent years, digital holographic interferometry has developed rapidly. It uses CCD and other photodetection devices to record holograms, and uses computers to realize digital reproduction of holograms. The whole process is more flexible and easier to analyze and detect. [0003] Digital holographic phase difference amplification is simply to multiply the phase distribution function in the complex amplitude distribution of the object field by an integer factor, such as N, to amplify the phase difference by N times. At this time, the change of the fringe spaci...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/021G03H1/04
Inventor 陈建文高鸿奕李儒新徐至展
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI