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Jigsaw

A wire saw, core wire technology, applied in the direction of grinding machines, fine working devices, abrasives, etc., can solve problems such as the inability to effectively prevent abrasive particles from falling off, the inability to optimize the spacing between abrasive particles or the amount of eccentricity, to prevent Peeling and peeling of adhesive material, excellent cutting performance, effect of preventing peeling of adhesive material

Inactive Publication Date: 2007-06-27
NORITAKE SUPER ABRASIVE CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, this manufacturing method manages the cutting performance of the wire saw by limiting the area occupied by abrasive grains on the surface of the wire saw, that is, the number of abrasive grains, and cannot optimize the distance between abrasive grains or the amount of eccentricity.
In this way, if manufacturing is performed only by controlling the number of abrasive grains, it is impossible to effectively prevent the falling of abrasive grains.

Method used

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Embodiment Construction

[0045] Hereinafter, the present invention will be described based on the device embodiment.

[0046] First, the detection method and detection apparatus of the wire saw used for manufacturing the wire saw of this invention are demonstrated.

[0047] FIG. 1 shows a detection device A used in a detection process in the wire saw manufacturing process.

[0048] In FIG. 1 , a CCD camera 2 is disposed along two axial directions perpendicular to the longitudinal direction of the wire saw 1 and perpendicular to each other, and an LED light source is disposed opposite to the CCD camera 2 with the wire saw 1 sandwiched between them. 3. The CCD camera 2 is connected to a camera power supply 4 , and the LED light source 3 is connected to an LED light source power supply 5 . A camera switcher 6 is connected to the two camera power sources 4 , the camera switcher 6 and the two LED light sources 3 are connected to a control device 7 , and the control device 7 is connected to a computing de...

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PUM

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Abstract

The present invention provides a linear saw which can optimize the number, distance and core deflecting amount of the abrasive grain adhered on the linear saw thereby effectively preventing the falling off of the abrasive grain. The linear saw is formed by the following mode, namely, the light permeating the linear saw which is fixed with abrasive grain by the adhesive material at the periphery of the core wire is used to shoot the image of the linear saw, the profile of the abrasive grain is detected according to the brightness of the image of the shot linear saw and does detection thereby mastering the position of the abrasive grain, at least the number, distance and projected area of abrasive grain are detected thereby detecting the respective condition of the abrasive grain and therefore lead to that the projected area of the abrasive grain is 2026300660r above or is 801r below relative to the projected area of the abrasive grain layer, leads to that the standard deviation of the distance of the abrasive grain is 200 mu m or below, and leads to that the ratio between thickness of thin abrasive grain layer to the thickness of thick abrasive grain layer is 0.6 or above for the abrasive grain layer which is spaced with a core wire and is formed at the two side of the core wire.

Description

technical field [0001] The present invention relates to a wire saw that optimizes the adhesion state of abrasive grains on the surface of the wire saw. Background technique [0002] Wire saws have been widely used in recent years for the purpose of cutting silicon wafers from large-diameter silicon ingots. [0003] One such wire saw is a wire saw with a resin bond, which is constructed by using a high-tensile metal as a core wire and covering the core wire with a material such as polyamide, polyimide, etc. An organic material such as an amine resin or an inorganic material such as glass is used as a binder, and abrasive grains are dispersed and contained therein. [0004] Ideally, a certain amount of abrasive grains are regularly adhered at almost equal intervals on the surface of the wire saw, but manufacturing errors may cause confusion in the adhered state of the abrasive grains. [0005] The most influential thing on the cutting performance of the wire saw is the fixat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D5/00B24B27/06B24D3/00B24D3/02B24D11/00B24D3/28
Inventor 井手大介峠直树
Owner NORITAKE SUPER ABRASIVE CO LTD