Process for synthesizing guartz glass by vertical silicon tetrachloride vapor deposition

A silicon tetrachloride and vapor deposition technology, applied in glass forming, glass manufacturing equipment, manufacturing tools and other directions, can solve the problems of restricting the production of large-sized quartz glass, reducing the strength of the base rod, and breaking the base rod under its own weight. Reduced energy consumption, rapid deposition, energy saving effect
CN1323043CInactive Publication Date: 2007-06-27CHINA BUILDING MATERIALS ACAD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHINA BUILDING MATERIALS ACAD
Publication Date
2007-06-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention discloses the vertical silicon tetrachloride vapor deposition process of synthesizing quartz glass. One vertical deposition furnace is designed, which includes chimney, closed furnace body, burner in the top of the furnace body, base rod standing inside the furnace body, deposition plane on the base rod and opposite to the burner, and lathe clamped to the lower part of the base rod. There may be several burners with several material feeding tubes each. The present invention makes it possible to produce quartz glass ingot with weight of 30-50 Kg and diameter of 250-500 mm in the deposition rate of 200-500 g / hr, 1-5 times higher than that of horizontal deposition furnace.
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Description

technical field

[0001] The invention relates to a method for synthesizing quartz glass by vapor phase deposition of silicon tetrachloride. Background technique

[0002] For more than two decades, quartz glass has been produced using a horizontal CVD production process. In this process, the deposition furnace adopts a horizontal furnace. The base rod of the furnace is arranged horizontally, one end is located inside the furnace body, and a deposition mound surface is fixed to the end of the base rod. As shown in Figure 1, the furnace body is open. , where the middle part is a chimney, a burner is provided outside one end of the furnace body, and a base rod is pierced through the other end. Crystals formed. There are three problems in the installation of horizontal furnaces: one is that the foundation rods are set horizontally, and the weight and the length of the foundation rods increase as the deposition mound surface accepts the deposits from the burner, and the pressure ...

Claims

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