A kind of diamond substrate and preparation method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 湖北碳六科技有限公司
- Publication Date
- 2020-08-21
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Abstract
Description
technical field
[0001] The invention relates to the technical field of diamond substrate preparation, in particular to a diamond substrate and a preparation method thereof. Background technique
[0002] Diamond has excellent physical and chemical properties, the highest hardness among all known substances, the highest thermal conductivity at room temperature, wide band gap (5.5eV), the highest sound propagation velocity, and high semiconductor The doping property and the optical transparency from the far-infrared region to the ultraviolet region make it have broad application prospects in many fields such as machining, microelectronics, and optics. However, the number of natural diamonds is scarce, and the high-temperature and high-pressure synthetic diamonds are not only expensive, but also the particle size of synthetic diamonds is limited, which prevents the excellent performance of diamonds from being fully utilized. In 1982, Matsumto et al. used chemical vapor depositi...