Process for synthesizing quartz glass by horizontal silicon tetrachloride vapor deposition

A horizontal silicon tetrachloride, synthetic quartz technology, applied in glass forming, glass production, glass deposition furnace and other directions, can solve the problems of reducing the strength of the base rod to bear the weight, low material surface temperature, low material yield and other problems , to improve the strength and anti-devitrification properties, increase the high temperature area, and improve the deposition environment.
CN1837113AActive Publication Date: 2006-09-27CHINA BUILDING MATERIALS ACAD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHINA BUILDING MATERIALS ACAD
Publication Date
2006-09-27

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Abstract

The invention discloses a horizontal silicon chloride vapour deposition synthesizing quartz glass method, which comprises the following parts: chimney, furnace body, deposition target surface, burner, basis bar and lathe, wherein the furnace body is blocked style furnace body; the front of furnace installs burner; the burner includes multiple-layer oxygen chamber; every oxygen chamber has a loop of oxygen lamp wick pipe; the bottom of multiple-layer oxygen chamber installs a hydrogen gas chamber; the bilateral oxygen chamber sets up two hydrogen air feeders; the basis bar forms hollow tube type, which places in furnace body; the number of the burners can be two to ten. The invention is characterized by the following: it makes the product weight reach to 100-200Kg; the diameter ratio of the quartz glass ingot is more than 250mm; the deposition rate can reach the speed at 180-500 grams an hour; the production efficiency can be improved three to five times than traditional.
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Description

technical field

[0001] The invention relates to a method for synthesizing quartz glass by vapor phase deposition of silicon tetrachloride, in particular a method for synthesizing quartz glass by using an improved horizontal deposition furnace. Background technique

[0002] For a long time, in the horizontal production process used in the production of quartz glass, the deposition furnace has been a traditional horizontal furnace, as shown in Figure 1 and Figure 2. Inside the furnace body, there is a deposition mound surface fixed to the port of the foundation rod. The furnace body is open, with a chimney in the middle, a burner outside one end of the furnace body, and a foundation rod pierced through the other end. The foundation rod passes through one end of the furnace body and a Lathe connection; the synthesis of quartz glass is usually formed by accepting the burner cutting material on the deposition target surface. There are three problems in the setting of this horizo...

Claims

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