Protective circuit of automation for semiconductor factory

Abstract

The invention discloses the protection circuit between the standard mechanical interface and the fabricating desk. First, the fabricating desk utilized in the semicondutor industry, the protection circuit and the automatic transport machining with the standard mechanical interface are provided. The protection circuit and the automatic transport machine with the standard mechanical interface are provided. The protection circuit includes at least the voltage sensing element, the logic assembly and the two luminous elements. The protection circuit through the voltage-sensing element receives the signal output by the fabricating desk and through the logic assembly makes the logic judgement to the signal output from the fabricating desk. The protecting circuit through the two luminous element displays the state of the fabricating desk and outputs the logic signals to the standard mechanical interface so as to control the operation of the automatic arm.

Description

Technical field: [0001] The present invention relates to a protective circuit for semiconductor factory automation, in particular to a protective circuit for manufacturing equipment and a standard mechanical interface automatic transmission device (Standardized Mechanical Interface, SMIF). When the production equipment does not reach the proper operating state, the protection circuit system will automatically close the loading / unloading (load / unload) function of the automatic transfer device (SMIF). Background technique: [0002] The need to reduce the manufacturing cost per unit of wafer drives the semiconductor industry to continuously search for ways to increase wafer yield and reduce manufacturing cycle time. As we all know, to increase the total output of a semiconductor wafer manufacturing system is nothing more than ensuring a stable wafer supply to each machine. Thus, the throughput of a fab's material management system affects the number of wafer carriers circulati...

AI Technical Summary

Problems solved by technology

For the operator, the situation of "miss-operation" (miss-operation) between the production machine and the automatic arm is often caused by operational errors

This kind of human negligence often causes the automatic arm to collide with the manufacturing machine or the wafer boat on the manufacturing machine, thereby damaging the manufacturing machine equipment or the wafer boat, so as to increase a lot of costs

Images