Solid-state imaging device and its mfg. method
A solid-state imaging device, solid-state technology, applied in radiation control devices, semiconductor/solid-state device parts, installations, etc., can solve the problems of production decline, hinder production improvement, and easy cracking of solid-state imaging components, and achieve connection failure. reduced effect
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Embodiment 1
[0108] figure 1 is a view of the main body portion of the solid-state imaging device of the first embodiment of the present invention.
[0109] In the solid-state imaging device of the first embodiment, when the solid-state imaging element 4 is connected to the resin structural member 1 having the wiring portion, the structural member 1 is formed such that the optical filter 3 passes through a ceramic plate having a thermal expansion coefficient smaller than that of the resin structural member 1 10S and connected to the filter mounting surface 8 of the resin structure 1.
[0110] Such as figure 2 As shown, a ceramic plate 10S is used as a fixing member having a rectangular ring shape with a thickness of about t=0.1-0.2 mm and a coefficient of thermal expansion of about 10 ppm / °C. The ceramic plate is composed of insulating polyphthalamide resin. The image forming apparatus includes: a resin structural member 1 comprising, a leg portion 1A having a rectangular truncated sha...
Embodiment 2
[0122] Below, refer to Figure 5 A second embodiment of the present invention will be described.
[0123] In the solid-state imaging device of the second embodiment, the structural member 1 is integrally molded, and the metal plate 10M is sandwiched in the resin structural member 1 . In this embodiment, the structural member 1 is integrally molded and the metal plate 10M is clamped in the structural member 1. The surfaces of the metal plate 10M are in contact.
[0124] In solid-state imaging devices such as Figure 5 As shown, a metal plate 10M having a rectangular ring shape is integrally molded between the filter mounting surface 8 and the solid-state image pickup element mounting surface 9 of the resin structural member 1 having a wiring portion made of thermoplastic PPS resin in parallel Because of these surfaces, deformation of the solid-state imaging element mounting surface 9 is suppressed.
[0125] Other parts are formed in the same manner as the first embodiment. ...
Embodiment 3
[0134] Below, refer to Figure 7 A third embodiment of the present invention will be described.
[0135] In the second embodiment, the structural member 1 is formed by integral molding in which a metal plate 10M is sandwiched in the resin structural member 1 and the back of the optical filter 3 is formed with the metal plate 10M sandwiched in the resin structural member 1 surface contact. In this example, as Figure 7 As shown, the ceramic plate 10S is sealed into the resin structure 1 except for the side facing the through portion 1C. However, the ceramic plate 10S can also be completely sealed into the structure 1 .
[0136] Other parts are formed in the same manner as the second embodiment. Like parts use the same reference numerals.
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