Film with multilayered metal and process for producing the same
A technology of metal thin film and composite thin film, applied in the fields of printed circuit manufacturing, metal layered products, chemical instruments and methods, etc.
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Embodiment 1
[0048] A polyimide film with a thickness of 50 μm was used as the polymer film. In addition, a 35 μm thick copper foil was used as the metal foil.
[0049] ① Forming a thin film on a polymer film
[0050] On one side of the polymer thin film 22, a nickel thin film as the metal thin film 24 was formed with a thickness of 300 nm by sputtering. This surface serves as a bonding surface with the metal foil.
[0051] ②Lamination of metal foil
[0052] A metal thin film composite film 28 in which a nickel thin film is formed on the surface of the polyimide film 22 and a copper foil 26 are provided on respective unwinding rolls 62 , 64 .
[0053] The metal thin film composite film 28 and the copper foil 26 unrolled from the film unwinding roll 62 are partially wound on the water-cooled electrode rolls 72, 82 provided in the vacuum vessel 52, and are sputtered in the first and second etching devices 70, 80. Radiation etching treatment and activation treatment.
[0054] Then, the m...
Embodiment 2
[0056] A polyimide film with a thickness of 50 μm was used as the polymer film. In addition, copper foil with a thickness of 50 μm was used as the metal foil.
[0057] ①Activation treatment
[0058] The polyimide film 22 and the copper foil 26 are set in a multilayer metal laminate composite film manufacturing apparatus 50 . The polyimide film 22 unrolled from the film unwinding drum 62 and the copper foil 26 unrolled from the metal foil unwinding drum 64 are respectively wound on the water-cooled electrode rollers 72, 82 in the vacuum vessel 52, and in the activation treatment device 70, It is activated by sputter etching.
[0059] ②Formation of metal thin film
[0060] After the activation treatment, the polyimide thin film 22 is wound on the water-cooled electrode roll 72 and sent to the sputtering device 90 as it is to form a nickel thin film with a thickness of 200 nm as the metal thin film 24 .
[0061] ③Pressure joint
[0062] The joint surfaces of the polymer film...
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Abstract
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