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Zinc aluminium oxide ceramic target material suface indium coating method

A zinc-aluminum oxide, ceramic target technology, applied in the field of surface treatment of special materials, can solve the problems of many processes, high price and high cost

Inactive Publication Date: 2004-02-18
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] Zinc-aluminum oxide ceramic targets need to be metallized on the back of the target for welding purposes. At present, ultrasonic welding machines are mainly used to weld indium to the surface of zinc-aluminum oxide ceramic targets. In this method, a large-scale ultrasonic welding machine must be used to metallize the zinc-aluminum oxide ceramic target. This machine is expensive, as high as hundreds of thousands of yuan. In the process of use, there are many processes, complicated operation, and high cost.

Method used

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Examples

Experimental program
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Embodiment Construction

[0008] 1. Take a 200mm*400mm zinc-aluminum oxide ceramic target, and clean the surface of the target with an organic solvent for later use; take 7 grams of silver oxide, 1.5 grams of silicon dioxide, and 2 grams of turpentine, mix them completely, and brush them with a brush Go to the back of the cleaned zinc-aluminum oxide ceramic target, wait 10-15 minutes, put it in a heating furnace for heating, the heating rate is 1 degree per minute, when it is heated to 560 ° C, stop heating after 15 minutes of heat preservation, and then Cool naturally to room temperature. A uniform layer of silver is formed on the surface of the zinc-aluminum oxide ceramic target. Put the sintered silver target on a flat heater and heat it to 180°C, put the indium on the silver layer, after the indium is completely melted, brush the indium evenly with a wire brush, and naturally cool to room temperature to complete the zinc-aluminum oxide ceramic target The surface of the material is backed with indi...

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Abstract

A process for attaching an indium layer on the surface of zinc aluminium oxide ceramic target includes preparing silver slurry from silver oxide, 70-80 % wt, SiO2 10-15 % wt. and turpentine 10-20% wt, spraying it on the surface of said target, drying, heating at 550-580 deg.C for 15 min, cooling heating to 180-220 deg.C, spraying indium powder to smelt it. Its advantage is low cost.

Description

technical field [0001] The invention relates to a method for carrying indium on the surface of a zinc-aluminum oxide ceramic target, belonging to the field of surface treatment technology for special materials. Background technique [0002] Zinc-aluminum oxide ceramic targets need to be metallized on the back of the target for welding purposes. At present, ultrasonic welding machines are mainly used to weld indium to the surface of zinc-aluminum oxide ceramic targets. In this method, a large-scale ultrasonic welding machine must be used to metallize the zinc-aluminum oxide ceramic target. This machine is expensive, up to hundreds of thousands of yuan. In the process of use, there are many processes, complicated operation, and high cost. Contents of the invention [0003] The purpose of the present invention is to provide a method for backing indium on the surface of a zinc-aluminum oxide ceramic target material with simple process and low cost. [0004] The surface back i...

Claims

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Application Information

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IPC IPC(8): C04B41/89C04B41/90
Inventor 赵大庆董民超
Owner TSINGHUA UNIV
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