Unlock instant, AI-driven research and patent intelligence for your innovation.

Corrosion proof nozzle head and manufacturing method thereof

A manufacturing method and nozzle head technology, applied in printing, metal material coating process, etc., can solve the problems of reducing product qualification rate, shortening service life, difficult cleaning and maintenance, etc.

Inactive Publication Date: 2004-08-18
AU OPTRONICS CORP
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] To sum up, the prior art nozzle heads used in the etching process are severely corroded in a short period of time, which shortens the service life and is not easy to clean and maintain
Frequent replacement of expensive nozzle heads is a burden for semiconductor manufacturers
In addition, the particles produced by corrosion will also reduce the product qualification rate

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Corrosion proof nozzle head and manufacturing method thereof
  • Corrosion proof nozzle head and manufacturing method thereof
  • Corrosion proof nozzle head and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0029] The invention replaces the sulfuric acid solution used in electroplating the nozzle head in the prior art with an oxalic acid solution. The experimental results show that when the oxalic acid solution is selected as the electroplating solution, the formed Al 2 o 3 The thickness of the film is about 25-35 μm, although it is thicker than the existing Al 2 o 3 The film needs to be thin, but it has better corrosion resistance, and greatly prolongs the service life of the nozzle head to 3 months, which is about 6 times of the service life (2 weeks) of the prior art nozzle head.

[0030] In addition to replacing the electroplating solution with oxalic acid solution, the following is a further improvement on the physical structure of the nozzle head.

[0031] Figure 3A A schematic front view of a nozzle head according to a preferred embodiment of the present invention is shown. The improved nozzle tip 300 is no different from the front side 106 of the prior art nozzle ti...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention discloses anticorrosive nozzle and its making process. The nozzle includes one aluminum pedestal and one ceramic jet board embedded onto the aluminum pedestal and has several jets to spray etching gas. Acetic acid is adopted as the electroplating liquid for the nozzle, and the back of the ceramic jet board is hollowed out to eliminate aluminum material to avoid corrosion and improved performance. The nozzle of the present invention has excellent anticorrosive performance resulting in low production cost, no particle contamination and easy cleaning and maintenance.

Description

technical field [0001] The invention relates to a nozzle head used in a dry etching process, in particular to a corrosion-resistant nozzle head in the dry etching process and a manufacturing method thereof. Background technique [0002] In the reaction chamber (chamber) of the dry etching machine, a nozzle head (show head) is used to spray etching gas. Please refer to Figure 1A , which shows a schematic front view of a prior art nozzle head. The nozzle head 100 of the prior art is composed of a large cross-shaped aluminum base 102 and a small cross-shaped ceramic plate 104, wherein the aluminum base 102 has a front and a back, and the ceramic plate 104 is embedded in the aluminum base. at the center of the front 106. Figure 1B show Figure 1A Schematic of the back of the middle nozzle tip. The back surface 108 of the aluminum base 102 is still aluminum material relative to the ceramic plate 104 , and a plurality of gas holes 110 are formed on the aluminum material to in...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): B41J2/14B41J2/16C23C22/02
Inventor 施政隆郭浩祯胡永祥徐应吉
Owner AU OPTRONICS CORP