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High pressure water bath laser ablation and processing method

A laser ablation and processing method technology, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems of not being able to simultaneously improve the mechanical stress distribution of the workpiece, the negative impact of the workpiece surface morphology, shape defects and stress defects, etc. , to achieve the effects of suppressing large-scale diffusion, improving smoothness and processing accuracy, and improving surface morphology

Inactive Publication Date: 2004-11-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

The surface of the workpiece after the action will have various shape defects and stress defects, and the machining accuracy will also be affected
In the improved method, nozzles are often used to spray inert gas or other gases (such as oxygen) on the ablation site to isolate the air and remove laser processing spatter during the ablation process, but this method can only improve the shape of the workpiece surface. However, the mechanical stress distribution of the workpiece cannot be improved at the same time; at the same time, the use of gas assist increases the difficulty of operation in some occasions; there is also an ordinary water bath environment to suppress the affected area of ​​​​laser ablation spatter, but the air bubbles generated during water vaporization are premature. Rapid expansion, when the ablation scale is too small, it will have a certain negative impact on the surface morphology of the workpiece after the action

Method used

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  • High pressure water bath laser ablation and processing method

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Embodiment Construction

[0013] figure 1 It is a layout diagram of an embodiment of the high-pressure water bath laser ablation and processing method of the present invention, wherein: Laser 1 adopts the 532nm second harmonic output of Spectron-SL454G-Nd:YAG solid-state laser. After the laser passes through the JD-1 attenuator 2, part of the laser light is split by the beam splitter 3 and then monitored by the power meter 4. The transmitted laser light is shaped by the spatial filter 5 . 6 is a 45° full-reflection film, which deflects the incident laser light by 45°, and then converges to the workpiece 10 through the small hole 7 and the lens 8 . The workpiece 10 is immersed in the container 9 filled with water and added 6 atmospheres through the valve 11, and the water surface is higher than the top of the workpiece by 5-10 mm.

[0014] In this embodiment, silicon wafers are drilled and cut, and good results are obtained.

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Abstract

The invention is a laser melting and processing method of high-pressure water bath, and its characteristic: it includes the following steps: placing the workpiece in a container with water, where the water surface is higher than the top surface of the workpiece by 1-10mm; regulating the water surface pressure at 5-6 atmospheric pressures; then making laser melting and processing. It not only can improve the surface appearance of a workpiece in a more micro melting region but also enhances mechanical property of the workpiece, and has the advantages of convenient use, low cost, environmental protection, etc.

Description

Technical field: [0001] The invention relates to laser processing, in particular to a high-pressure water bath laser ablation and processing method (hereinafter referred to as ablation). Background technique: [0002] In laser ablation, the workpiece to be ablated or the workpiece (hereinafter referred to as the workpiece) is generally exposed to the air. The surface of the workpiece after the action will have various shape defects and stress defects, and the machining accuracy will also be affected. In the improved method, nozzles are often used to spray inert gas or other gases (such as oxygen) on the ablation site to isolate the air and remove laser processing spatter during the ablation process, but this method can only improve the shape of the workpiece surface. However, the mechanical stress distribution of the workpiece cannot be improved at the same time; at the same time, the use of gas assist increases the difficulty of operation in some occasions; there is also a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/00B23K26/146
Inventor 凌磊楼祺洪叶震寰董景星魏运荣
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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