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Co-optical circuit double-frequency heterodyne confocal micromeasurer

A measuring device, confocal microscopy technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem that the measuring light and reference light do not conform to the principle of common path, limit the measurement accuracy, etc., and achieve high measurement accuracy and relatively large Measuring range, effect of vibration and drift suppression

Inactive Publication Date: 2005-01-12
TSINGHUA UNIV
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  • Application Information

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Problems solved by technology

Although this solution achieves large-scale and high-resolution measurement, because the measurement light and reference light do not conform to the principle of common path, the measurement device is greatly affected by vibration and temperature drift, which limits the measurement accuracy

Method used

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  • Co-optical circuit double-frequency heterodyne confocal micromeasurer
  • Co-optical circuit double-frequency heterodyne confocal micromeasurer
  • Co-optical circuit double-frequency heterodyne confocal micromeasurer

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Embodiment Construction

[0016] The specific details of the present invention will be described below in conjunction with the accompanying drawings.

[0017] The structure of the embodiment of the present invention is as Figure 4 As shown, the device includes a transverse Zeeman dual-frequency laser 1, a beam splitter 2, a first converging lens 4, a first pinhole 5, a first cemented lens 6, a first half Transparent half-mirror 7, birefringent lens group 8 and microscope objective lens 9, and the first photodetector 3 that is arranged on the reflected light path of described spectroscope 2; This device also includes being arranged at the first half-mirror 7 The second half mirror 11 on the reflection light path of the second half mirror 11, and the Glan prism 16, the second cemented lens 17, the second pinhole 18, the second half mirror 11 respectively arranged on the reflection light path of the second half mirror 11 Two photodetectors 19, and an aperture 12, a second converging lens 13, and a third...

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Abstract

The invention belongs to technique area for measuring appearance of surface, in order to raise resolving power and range, as well as guarantee high stability of the system. the disclosed device includes following parts: transverse Zeeman two-frequency laser, and beam splitter, first convergent lens, first pinhole, first contact lens, first semitransparent and half reflecting mirror, birefringence lens assembly and object lens of microscope setup on axis of laser in sequence; first photo detector on reflection path of the beam splitter; second semitransparent and half reflecting mirror; Glan prism, second contact lens, second pinhole etc. on reflection path of the second semitransparent and half reflecting mirror. Features are: low drift and high capability of antivibration and anti-interference.

Description

technical field [0001] The invention belongs to the technical field of surface topography measurement, in particular to a microscopic measuring device for step height standard measurement. Background technique [0002] Confocal scanning imaging was proposed by Minsky as early as the 1950s, and then Davidovits, Sheppard and Wilson made further research on confocal microscopy systems. The research results show that: the confocal scanning microscope system can not only suppress the weak stray light in imaging, but also under the same imaging conditions, its axial resolution is 1.4 times that of the ordinary microscope system, and it has the function of three-dimensional tomography. figure 1 It is the optical path diagram of a common reflection confocal microscope, assuming that the measured object is a total reflector and scanned along the axis of the objective lens. When the object is at the focal plane ( figure 1 When the solid line in ), the reflected light is precisely fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/04G01B11/24
Inventor 孟永钢柳忠尧阎聚群张蕊林德教殷纯永
Owner TSINGHUA UNIV
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