Four-freedom face-down spline connecting head

Abstract

The invention discloses a four-degree of freedom inverted spline combining end,including a double-degree of freedom series mechanism based on the ball spline, a double-degree of freedom snout mechanism and an absorbing snout.In the series mechanism, the ball spline shaft connects to the slide block through the turning assistance, the driving slide block realizes the inverted spline combining end to move in Z direction; the sleeve is fixed on the rack through another turning assistance, the stir folk of the driving and the sleeve realizes the inverted spline combining end to turn in the Z direction; the shunt mechanism is composed of the upper and the lower platforms, and a fixing branch chain that connects the upper and the lower platforms and two movable branch chains, the movable assistance of the two driving movable branch chains realizes the inverted spline combining end to slightly turn in X, Y direction ;the upper platform of the shunt mechanism fixedly connects with the ball spline shaft, the lower platform is equipped with the picking-up absorbing snout. This invention realizes the degree of freedom needed by the leveling,aiming, bonding,and has the characteristics of fast resolution, high strength and precision and tight structure.

Description

technical field [0001] The invention belongs to the field of semiconductor packaging equipment manufacturing, and relates to a hybrid mechanism four-degree-of-freedom flip-chip bonding head based on a parallel mechanism, which realizes the space required for leveling, alignment and bonding in the chip flip-chip bonding process sports. Background technique [0002] Flip chip technology (Flip Chip) is a method in which a chip is directly mounted and interconnected with a substrate in a bump array structure. Compared with chip interconnection technologies such as wire bonding, flip-chip technology has great advantages in terms of size, appearance, flexibility, reliability, precision, and cost. At present, flip chips are widely used in various electronic products such as electronic watches, mobile phones, computers, disks, walkmans, LCDs, and mainframes. [0003] In order to achieve high-density (up to 1600 bumps), high-precision (bump minimum pitch 200um) flip-chip interconne...

AI Technical Summary

Problems solved by technology

The 3-RRR parallel mechanism uses three rotating pairs to realize the three-degree-of-freedom rotation of the moving platform. The central axes of all rotating pairs intersect at a fixed point, which can strictly guarantee the three-degree-of-freedom rotation of the moving platform, but the mechanism is an over-constrained system , if the assembly and manufacturing accuracy is not high, it is easy to cause the mechanism to be stuck; the 3-UPS parallel mechanism uses the moving pair as the driving joint, and the moving platform is connected to the fixed platform through a passive spherical joint, which can ensure the spherical motion of the moving platform with three degrees of freedom. The existence of the passive spherical joint greatly reduces the working space; the 3-UPU parallel mechanism also uses the moving pair as the driving joint, and can realize pure rotation, pure movement, or both through different geometric assembly conditions. When pure rotation is realized, the axes of all rotating pairs connected to the upper and lower platforms intersect at one point, which makes assembly difficult and prone to strange shapes and positions

The above-mentioned spherical three-degree-of-freedom parallel mechanism generally has shortcomings such as small working space, complex structure, and difficult control.

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