Quantum lattice diffracting rasters
A diffraction grating and quantum dot technology, applied in the field of diffraction gratings, can solve problems such as errors, reflection holographic grating reflectivity cannot be guaranteed, diffraction grating interference, etc., to avoid interference and errors, eliminate advanced diffraction, and improve monochromatic performance.
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Embodiment 1
[0034] figure 1 It is a square quantum dot array plane transmission diffraction grating according to an embodiment of the present invention.
[0035] The preparation process of the embodiment of the present invention is:
[0036] ① First of all, using computer-aided design methods, based on the formula ρ N (x)=(1 / 2+1 / 2cos(πx / d))d produces figure 1 The square quantum dot array plane transmission diffraction grating pattern shown, where ρ N Is the number density of quantum dots, x is a certain dimensional coordinate on the surface of the grating substrate, and d is the period length of the sinusoidal change. The size of quantum dots is much smaller than d, at least 1 / 5 of d.
[0037] ②. Convert the square quantum dot array plane transmission diffraction grating pattern generated in ① into LEDIT format file;
[0038] ③Using CNC focused electron beam lithography equipment, controlled by the LEDIT file generated in step ②, will be as figure 1 The square quantum dot array plane tran...
Embodiment 2
[0041] The quantum dot array plane transmission diffraction grating obtained in Example 1 was used as the X-ray lithography mask, and the quantum dot array plane transmission diffraction grating was obtained by using X-ray lithography technology to replicate. The quantum dot material was gold, and the transparent substrate surface material was used. CH material.
Embodiment 3
[0043] Preparation of the inverse grating of the quantum dot array diffraction grating.
[0044] By the transfer method, the same material as in Example 1 or Example 2 is used to produce a pattern structure opposite to that in Example 1 or Example 2, and the inverse grating of the quantum dot matrix diffraction grating can be made. The diffraction pattern of the inverse grating is the same as the diffraction pattern of Example 1 or Example 2.
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