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High concentration silica slurry

A high-concentration, silica-based technology, applied in the direction of silicon compounds, inorganic chemistry, non-metallic elements, etc., can solve the problems of loss of fluidity, mud viscosity stability time deterioration, etc.

Inactive Publication Date: 2005-12-21
NIPPON AEROSIL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the silica concentration limit of conventional silica dispersion mud is about 40%. If the silica concentration is higher than this value, most of them will lose proper fluidity
Conventional dispersions have the problem that the viscosity stability of mud deteriorates over time

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Fumed silica (trade name VP-OX30, specific surface area 30m 2 / g, products of Aerosil Corporation of Japan), this fumed silica was added to distilled water, stirred and dispersed into mud, adjusted to pH 8.9, and made into mud whose silica concentration was 75%. The viscosity and time-lapse viscosity ratio of this mud were measured. Table 1 shows the measurement results and slurrying conditions.

Embodiment 2

[0030] Fumed silica (trade name VP-OX10, specific surface area 10m 2 / g, product of Aerosil Corporation of Japan), this fumed silica was added to distilled water, stirred and dispersed into mud, adjusted to pH9.2, and made into mud whose silica concentration was 80%. The viscosity and time-lapse viscosity ratio of this mud were measured. Table 1 shows the measurement results and slurrying conditions.

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PUM

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Abstract

A kind of high-concentration silica mud, it is characterized in that: the silica concentration that forms by dispersing silica powder in the solvent is more than 50wt%, and viscosity is below 1000mPa·s, wherein said silica powder obtains the average particle diameter ( The ratio (DL / DT) of DL) to the average particle diameter (DT) obtained by TEM imaging is 1.3 or less, and the average primary particle diameter is 0.08 μm to 0.8 μm. It is preferable to use high-concentration silica mud with a silica concentration of 70 wt% to 80 wt% and a viscosity of 800mPa·s or less during mud preparation. The silica mud uses silica powder with a specific impurity content. The impurities of sodium and potassium in the silica powder The concentrations are all 1.0 ppm or less, the aluminum content is 1.0 ppm or less, and the respective contents of sulfur, nickel, chromium and iron are all 0.5 ppm or less.

Description

technical field [0001] The present invention relates to a low-viscosity silica slurry which has low viscosity even at high concentrations by using silica powder of uniform particle size and low agglomeration, and also relates to abrasive properties prepared using the silica slurry high abrasive composition. The silica dispersion slurry of the present invention disperses silica powder without sedimentation in a wide concentration range from low concentration to high concentration, and has low viscosity, so it has good operability and time stability, and is suitable for high-speed grinding or rough grinding. Moreover, because there are few impurities, it is also suitable for chemical polishing of semiconductor materials. In addition, since it can be operated at a high concentration, it also has the advantage of being able to supply materials at low cost. Background technique [0002] In chemical grinding (CMP), dispersion mud of fumed silica or colloidal silica can be select...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/141C09C1/68C09G1/02C09K3/14
CPCC01B33/1417C09G1/02C09K3/1463C01B33/141C09K3/14
Inventor 森井俊夫B·保罗
Owner NIPPON AEROSIL
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