Organic film transistor containing non-reactive active buffer layer and making method thereof
An organic thin film and buffer layer technology, applied in the field of OTFT containing a non-reactive buffer layer and its fabrication, can solve the problems of loss of on-off current ratio, poor repeatability, increased conductance, etc., to enhance on-state current and improve performance , the effect of reducing off-state current
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Embodiment 1
[0030] The monophthalocyanine compounds used below are commercially available, and the bisphthalocyanine compounds were synthesized by known methods. The above two materials were purified three times by vacuum sublimation.
[0031] A layer of Ta metal film was plated on the 7059 glass substrate 1 by radio frequency magnetron sputtering method, and the sputtering conditions were: background vacuum 2×10 -3 Pa, Ar gas pressure 1Pa, RF power 500W, substrate temperature 100°C, and photolithographically form the gate electrode 2; a layer of 300nm Ta is continuously sputtered on the substrate 1 and the gate 2 by DC magnetron sputtering method 2 o 5 As the gate insulating layer 3, the reactive sputtering condition is: background vacuum 2×10 -3 Pa, O 2 Air pressure 0.9Pa, DC power 500W, substrate temperature 100℃, then, at 10 -5 The quartz boat that is filled with CuPc powder is heated under the high vacuum of Pa, makes it sublime to form the semiconductor active layer 4 of thickne...
Embodiment 2
[0033] The material used for the buffer layer is a charge transfer complex containing 7,7',8,8'-tetracyanobenzoquinone. The source and drain electrode materials used are double-layer metal films of Ti and Au. The insulating material used is Al 2 o 3 . All the other processing steps and conditions are identical with embodiment 1.
Embodiment 3
[0035] The material used for the buffer layer is polyacetylene. The source-drain electrode material used is Ag. The insulating material used is TiO 2 . All the other processing steps and conditions are identical with embodiment 1.
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