Multi-layer nanometer film coater for reinforcing mould surface

Abstract

A multi-layer coated equipment in nanometer level which consists of the following parts: evacuated chamber, cylinder framework for clapboard with aperture, at least four pieces of clapboards which were fixed on cylinder framework, dividing the evacuated chamber into at least four disconnecting chambers, central pump-line with aperture , at least two evaporating plants and one ion source which were fixed on evacuated chamber wall, at least four work rests each of which was fixed in one disconnecting chamber separately, single-core multi-spindle magneto fluid gearing and bleeding point. All the clapboards, cylinder framework and work rests can do synchronous revolution by sharing one revolution axis. This equipment can be used to deposit multilayer membrane in nanometer level and to modulate membrane composition and thickness. Advantages are component singleness in each membrane and sharp and clear interface among different membranous layers. It can be used in surface peening of die and other parts.

Description

technical field

[0001] The invention relates to a film coating device capable of depositing nanometer multi-layer film for strengthening the surface of a mold. Background technique

[0002] As an advanced material surface modification technology, physical vapor deposition has been widely used in various fields of national economy. In the past two decades, TiN-based single-layer films have been widely used in the decoration industry. The rapid development of China's manufacturing industry has put forward higher and higher requirements on the hardness and wear resistance of processing and forming tools such as tools and molds, and other mechanical parts, and the single-component film layer often cannot meet these requirements. Since the multilayer film contains two or more layers of materials, it is often better than a single film layer in terms of hardness, wear resistance, impact resistance, and corrosion resistance. Patent CN1156598C discloses a multi-layer composite film...

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