Lapping sheet and its manufacturing method and polishing device

A manufacturing method and technology of abrasive sheets, which are used in grinding devices, manufacturing tools, grinding machine tools, etc., can solve the problems of poor fluidity of grinding fluid, difficulty in uniform grinding pad batches, and poor chip evacuation, and achieve good fluidity. Effect

Inactive Publication Date: 2006-08-09
SAN FANG CHEM IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, Chinese Patent Announcement No. 528646 discloses that the thermoplastic foamed polymer is poured into a circular mold barrel, and the abrasive pad obtained by slicing will not be uniform due to the distribution of the slurry concentration in the circular mold. The difference in temperature distribution at each position of the casting mold causes the hole size and distribution of the polishing pad to be different, and it is difficult to control. After the grinding and slicing process, the size of the holes on the slice surface of the polishing pad will be more obvious, and the holes are different from each other. There is no intercommunication, so that the fluidity of the polishing liquid is poor during the polishing process, and the abrasive particles in the polishing liquid are not easy to effectively diffuse and distribute
Furthermore, during the polishing process, debris is likely to remain on the surface of the polishing substrate, resulting in poor chip removal, which will scratch the polishing substrate
In addition, when producing abrasive pads, the distribution of slurry concentration and molding temperature in the circular mold is not uniform, resulting in poor batches of abrasive pads, that is, each abrasive sheet has a different polishing effect, which in turn affects the polishing quality control

Method used

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  • Lapping sheet and its manufacturing method and polishing device
  • Lapping sheet and its manufacturing method and polishing device

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Embodiment Construction

[0022] refer to figure 1 , according to the method for manufacturing an abrasive sheet according to an embodiment of the present invention, first provide a non-woven fabric with fibers (step 202), and impregnate the non-woven fabric with a polymer elastomer resin solution to form an impregnated layer in the non-woven fabric (step 204 ), and then the impregnated layer is solidified (step 206), washed (step 208) and dried (step 212) to form a semi-finished abrasive sheet (step 214). The abrasive sheet semi-finished product includes the non-woven fabric and the polymer elastic body with interconnected porosity, wherein the polymer elastic body has interconnected holes and is solidified and combined in the non-woven fabric. Those with ordinary knowledge in the technical field of the present invention know that if the aperture of the communicating hole of the polymeric elastomer is too large, the abrasive particles will gather in the communicating hole during the polishing process;...

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Abstract

The invention relates to a grinding sheet material that contains a nonwoven fabric and an interconnected porosity macromolecule elastic body. The surface of the grinding sheet material is the fiber of nonwoven fabric and the macromolecule elastic body.

Description

technical field [0001] The present invention relates to an abrasive sheet, and more particularly relates to an abrasive sheet, the surface of which is composed of fibers and polymeric elastic body with interconnected porosity. Background technique [0002] The chemical mechanical polishing (CMP) process is a method currently implemented in the semiconductor and liquid crystal display industries to planarize the surface of a semiconductor substrate or a glass substrate. [0003] Chinese Patent Announcement No. 528646, the patent name "Chemical Mechanical Planarization Polishing Pad", discloses that a heat-cured mixed slurry is placed in a mold with grooves, and the heat-cured mixed slurry is ground after cooling Cutting into thin slices, or mechanically shaping it into thin slices, can obtain a polishing pad (that is, a polishing pad) for a chemical mechanical polishing device. However, Chinese Patent Announcement No. 528646 discloses that the thermoplastic foamed polymer is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/04H01L21/304B24B37/11
Inventor 冯崇智赵征祥姚伊蓬李志仁洪永璋
Owner SAN FANG CHEM IND
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