Apparatus and method for substrate neutralization and glass substrate charging prevention

Abstract

A neutralizing method and a neutralizing apparatus for effectively neutralizing an insulating member in a simple and efficient way are disclosed. A hard X-ray generating device radiates a hard X-ray on the obverse surface of the insulating member from the direction perpendicular to the obverse surface of the insulating member. The hard X-ray generating apparatus radiates a hard X-ray having the wavelength of not less than 0.05 AA but less than 1 AA. The hard X-ray ionizes the air on the obverse surface of the insulating member and neutralizes the charge on the obverse surface of the insulating member, while at the same time neutralizing the charge on the reverse surface of the insulating member by the X-ray transmitted through the insulating member.

Description

technical field [0001] The invention relates to a method for removing static electricity for an insulator substrate, a device for removing static electricity, an antistatic method for a glass substrate, and an antistatic device for the glass substrate. Background technique [0002] Conventionally, in the manufacturing process of glass substrates used in liquid crystal displays, etc., electrons are trapped in unbonded parts of atoms due to friction with conveyor belts during transportation or peeling when separated from vacuum chucks. In addition, by ionizing the atoms, it is possible to positively or negatively charge the insulating substrate. [0003] In this way, when the glass substrate is charged with static electricity, there is a disadvantage of attracting surrounding fine dust or causing dielectric breakdown of various thin films deposited on the substrate. In addition, when using a glass substrate with an electrostatic state to manufacture a liquid crystal display, ...

AI Technical Summary

Problems solved by technology

[0015] For example, for Figure 8B The back side of the glass substrate shown, specifically, in the lateral direction, when soft X-rays are irradiated from the soft X-ray generator 5#A on the right and the soft X-ray generator 5#B on the left, the The position near the X-ray soft X-ray tube has a significant difference in ionization concentration, and as a result, there is a possibility of uneven static elimination.

[0016] Therefore, if you want to eliminate unevenness in destaticization and perform destaticization of a wide range of areas such as glass substrates, as Figure 8C As shown, it is necessary to install multiple soft X-ray generating devices 5#, which not only makes the equipment expensive, but also takes a lot of time and cost in setting and maintenance

Images