Electrode antenna integrated photoelectric integrated sensor for testing strong electric field
A photoelectric integration and sensor technology, applied in electrostatic field measurement, current/voltage measurement, electric variable measurement, etc., can solve the problem that strong electric field sensors cannot fully meet the requirements of strong electric field measurement, and improve the measurement frequency range and response speed , Fast response speed and strong position resolution ability
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[0019] The electrode-antenna integrated photoelectric integrated sensor for strong electric field measurement proposed by the present invention has a structure such as figure 2 As shown, a chip 5 with electro-optic effect is adopted, and optical waveguides 6 with Y-shaped bifurcations at both ends and parallel to each other in the middle are formed on the surface of the chip 5 by titanium metal diffusion method or proton exchange method, and two sections of optical waveguides parallel to each other are arranged on Three gate-shaped electrode antennas 7 with protrusions on the top, and the three gate-shaped electrode antennas 7 are parallel to each other and straddle two sections of optical waveguides that are parallel to each other.
[0020] The wafer 5 in the photoelectric integrated sensor mentioned above can be any one of lithium niobate wafer, bismuth silicate wafer, bismuth germanate wafer or potassium titanyl phosphate wafer.
[0021] The width of the electrode antenna ...
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