Chemical and mechanical polishing liquid
A technology of chemical mechanics and polishing fluid, which is applied in grinding/polishing equipment, polishing compositions containing abrasives, and machine tools suitable for grinding the edge of workpieces, etc., and can solve problems such as high polishing rate, pitting corrosion, and corrosion. To achieve the effect of expanding the process parameter window, improving the level of planarization, and reducing the polishing rate
Active Publication Date: 2007-01-24
ANJI MICROELECTRONICS (SHANGHAI) CO LTD
View PDF1 Cites 25 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] In typical chemical mechanical polishing of metals, defect levels are often high, especially if pitting, edge erosion, corrosion, etc. are present
Moreover
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0043] Chemical Mechanical Polishing Fluid 1: 20.0wt% silica particles, 10.0wt% PAA (molecular weight: 2000) and water as the balance, with a pH of 7.7.
Embodiment 2
[0045] Chemical Mechanical Polishing Fluid 2: 20.0 wt% silica particles, 10.0 wt% acrylate acrylic copolymer (molecular weight 2,000) and balance water, pH 7.7.
Embodiment 3
[0047] Chemical Mechanical Polishing Fluid 3: 20.0 wt% silica particles, 10.0 wt% PAA (molecular weight: 2,000), 10.0 wt% succinic acid and water as the balance, pH 7.7.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more PUM
Login to view more
Abstract
The present invention discloses a kind of chemical and mechanical polishing fluid, which includes at least one kind of grinding grain, one kind of chemical additive and one kind of carrier, where the chemical additive is polycarboxylic acid and/or its salt. The chemical and mechanical polishing fluid can raise the flatness of the polished metal surface, lower the metal polishing rate obviously, optimize the dielectric polishing rate and expand technological parameter window.
Description
technical field [0001] The invention relates to a chemical mechanical polishing fluid. Background technique [0002] With the development of microelectronics technology, the integration level of very large scale integrated circuit chips has reached billions of components, and the feature size has entered the nanometer level, which requires nearly a hundred processes in the microelectronics process, especially multi-layer wiring, lining The bottom and medium must be chemically mechanically globally planarized, and chemical mechanical polishing (CMP) has been proven to be the best planarization method. [0003] In chemical mechanical polishing methods, the polished surface of a substrate is brought into direct contact with a rotating polishing pad while pressure is applied to the backside of the substrate. During polishing, the polishing pad rotates with the operating table while maintaining a downward force on the back of the substrate, and a liquid composed of abrasives and...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more Application Information
Patent Timeline
Login to view more
IPC IPC(8): C08J5/14B24B9/04
CPCC09G1/02H01L21/3212
Inventor 杨春晓俞昌肖正龙荆建芬
Owner ANJI MICROELECTRONICS (SHANGHAI) CO LTD
Who we serve
- R&D Engineer
- R&D Manager
- IP Professional
Why Eureka
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Social media
Try Eureka
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap