Laser measuring method for non-contact type micro-rotor vibration displacement

A technology of rotor vibration and laser measurement, which is applied in the field of micro-electromechanical systems, achieves the effects of simple implementation, high measurement accuracy, and avoiding low accuracy
CN1924537AInactive Publication Date: 2007-03-07SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI JIAO TONG UNIV
Publication Date
2007-03-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

This invention relates to non-contact micro rotor vibration displacement laser measurement in the micro machine technique field. This invention uses radio ejector to send laser band to scan the micro rotor movement status, wherein, the micro rotor high speed track is collected by CCD displacement sensor and image collector card to get the vibration signals by image process technique. The invention adopts hardware system in charge for micro rotor high speed rotation to realize stable control and vibration image signal collection ad adopts software system to process the image signals to extract characteristic points to get the movement track from the fix points of rotor.
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Description

technical field

[0001] The invention relates to a method in the field of micro-electromechanical technology, in particular to a non-contact laser measurement method for vibration displacement of a micro-rotor. Background technique

[0002] With the increasing development of science and technology, higher and higher requirements are put forward for the operating speed and working life of the micro-rotary machinery. Vibration affects the stable operation of the system. Effective and timely measurement and analysis of various vibrations has become an important link to improve the normal operation of the micro rotating machinery system. A high-precision displacement measurement system is the basis for obtaining positional accuracy in the fields of micro-machinery, instrumentation, etc., and it is also a constraint factor for the continuous progress of the above-mentioned products and technologies. At present, there are many researches on the sensing and measurement technology o...

Claims

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