Method for manufacturing circuit substrate
A technology of circuit substrate and manufacturing method, which is applied in the directions of printed circuit manufacturing, printed circuit, metal adhesion improvement of insulating substrate, etc. Effect
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Embodiment approach 1
[0039] [Embodiment 1]
[0040] figure 1 It is a schematic diagram showing each step in Embodiment 1 of the present invention.
[0041] First, if figure 1 As shown in (1), prepare a double-sided metal tension laminate in which copper foil with a thickness of 4 μm is used as a conductive metal layer on both sides of an insulating base material 1 such as a polyimide film. 2 is formed by setting. Next, if figure 1 As shown in (2), a UV-YAG laser is irradiated to this double-sided metal tension laminate to form via holes 3 as through holes.
[0042] Next, if figure 1 As shown in (3), the conductive substance 4 is added to the double-sided metal tension laminate in which the via hole 3 is formed by conducting a tube (Conductron) treatment or the like. Next, if figure 1 As shown in (4), a photosensitive dry film-type resist (not shown) is laminated on the double-sided conductive metal layer 2 to which the conductive substance 4 is added, and pattern exposure and developme...
Embodiment 1
[0051] First, "Espanex" (thickness 25 μm) produced by Nippon Steel Chemical Co., Ltd. was prepared in advance as a double-sided non-adhesive copper tension laminate with copper foil on both sides of the polyimide film, and half-etching was performed so that The thickness of the conductive metal layer on both surfaces was 4 μm.
[0052] Next, via holes with a diameter of 50 μm were formed using a UV-YAG laser. Next, the electroconductive substance is added by the tube treatment.
[0053] Next, a photosensitive dry film with a thickness of 20 μm was laminated, followed by pattern exposure and development to form a resist film for double-sided conduction except via holes and their pads. Thereafter, by copper sulfate plating treatment, a plated layer having a thickness of 8 μm or more and 12 μm or less is obtained as conduction between the conductive metal layers on both surfaces.
[0054] Next, using sodium hydroxide, the resist film for double-sided conductive plating was peel...
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